公开(公告)号：US20230187178A1

公开(公告)日：2023-06-15

申请号：US17993055

申请日：2022-11-23

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Youngil KANG ,  Byeongsang KIM ,  Jongmu KIM ,  Yongbeom PARK ,  Dougyong SUNG ,  Yunjae LEE ,  Seugkyu LIM ,  Kyuhee HAN

IPC分类号： H01J37/32

CPC分类号： H01J37/3244 ,  H01J2237/335 ,  H01J37/32724

摘要： A substrate processing apparatus includes: a process chamber; a substrate support structure disposed at a lower portion of the process chamber and configured to accommodate a substrate; and a gas supply module disposed at an upper portion of the process chamber and supplying a process gas to the substrate, wherein the gas supply module includes a showerhead that includes: a first showerhead body including a plurality of injection ports configured to transfer gas transferred from a gas inlet into the process chamber; and a coating layer covering the first showerhead body and including aluminum fluoride, wherein the first showerhead body includes a metal matrix composite (MMC).

公开(公告)号：US20240047247A1

公开(公告)日：2024-02-08

申请号：US18184418

申请日：2023-03-15

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Chansoo KANG ,  Daewon KANG ,  Sangki NAM ,  Jungmo YANG ,  Changsoon LIM ,  Sungho JANG ,  Jonghun PI ,  Youngil KANG ,  Yoonjae KIM ,  Ilwoo KIM ,  Jongmu KIM ,  Yongbeom PARK

IPC分类号： H01L21/67 ,  H01J37/32

CPC分类号： H01L21/67253 ,  H01J37/32944 ,  H01J2237/221

摘要： A semiconductor process device includes a chamber housing defining an internal region and a plurality of electrostatic chucks within the internal region. The chamber housing includes a window, and a light collection unit including a first optical system and a second optical system located at different positions on the window. A plurality of first optical pickup units are connected to the first optical system, and a plurality of second optical pickup units are connected to the second optical system. A sensor includes a plurality of photodetectors that are configured to convert a first optical signal transmitted by the plurality of first optical pickup units and a second optical signal transmitted by the plurality of second optical pickup units into electrical signals. A processor is configured to generate a spatial image of the internal region of the chamber housing using the electrical signals output by the plurality of photodetectors, and determine a location at which an arc occurs in the internal region of the chamber housing based on the spatial image.