公开(公告)号：US20180269054A1

公开(公告)日：2018-09-20

申请号：US15981795

申请日：2018-05-16

Applicant: SCIENTA OMICRON AB

Inventor： Björn WANNBERG

IPC: H01J49/48 ,  H01J49/06 ,  H01J37/05 ,  H01J49/00

CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

公开(公告)号：US20160336166A1

公开(公告)日：2016-11-17

申请号：US15221340

申请日：2016-07-27

Applicant: SCIENTA OMICRON AB

Inventor： Björn WANNBERG

IPC: H01J49/48

CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

Abstract translation: 本发明涉及一种用于确定与从颗粒发射样品发射的带电粒子有关的至少一个参数的方法。 与能量，起始方向，起始位置或颗粒的旋转相关的参数。 该方法包括以下步骤：通过透镜系统将带电粒子束引导到测量区域的入口，以及在测量区域内检测表示所述至少一个参数的粒子的位置。 此外，该方法包括以下步骤：在粒子束进入测量区域之前将粒子束在相同的坐标方向上偏转至少两次。 因此，能够以在某种程度上消除对样品的物理操作的需要的方式来控制测量区域入口处的粒子束的位置和方向。 这反过来允许样品被有效地冷却，从而能够提高能量测量中的能量分辨率。