-
公开(公告)号:US20120192645A1
公开(公告)日:2012-08-02
申请号:US13434803
申请日:2012-03-29
CPC分类号: G01F1/6845 , H01L23/3142 , H01L23/3192 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L2224/05599 , H01L2224/45144 , H01L2224/48227 , H01L2224/48599 , H01L2224/49171 , H01L2924/00014 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/04941 , H01L2924/14 , H01L2924/1461 , Y10T29/49002 , H01L2924/00
摘要: A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
摘要翻译: 耐腐蚀流量传感器装置包括流量传感器,其包括安装在包括导电迹线和衬底接合焊盘的封装衬底上的可微加工衬底。 流量传感器包括用于感测质量流量参数的MEMS感测结构和耦合到感测结构的传感器接合垫。 传感器接合焊盘包括在包括金属扩散阻挡层侧壁的金属扩散阻挡层上的顶部金属层。 接合线将传感器接合焊盘连接到衬底接合焊盘。 包括侧面和顶部的壳体围绕流量传感器并且包括具有入口和出口的流动通道。 多层防腐涂层包括纳米级粘附层,粘合层上自组装单层(SAM)。 保护涂层覆盖包括金属扩散阻挡层侧壁的传感器接合焊盘。
-
公开(公告)号:US20110146398A1
公开(公告)日:2011-06-23
申请号:US12641460
申请日:2009-12-18
CPC分类号: G01F1/6845 , H01L23/3142 , H01L23/3192 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L2224/05599 , H01L2224/45144 , H01L2224/48227 , H01L2224/48599 , H01L2224/49171 , H01L2924/00014 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/04941 , H01L2924/14 , H01L2924/1461 , Y10T29/49002 , H01L2924/00
摘要: A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
摘要翻译: 耐腐蚀流量传感器装置包括流量传感器,其包括安装在包括导电迹线和衬底接合焊盘的封装衬底上的可微加工衬底。 流量传感器包括用于感测质量流量参数的MEMS感测结构和耦合到感测结构的传感器接合垫。 传感器接合焊盘包括在包括金属扩散阻挡层侧壁的金属扩散阻挡层上的顶部金属层。 接合线将传感器接合焊盘连接到衬底接合焊盘。 包括侧面和顶部的壳体围绕流量传感器并且包括具有入口和出口的流动通道。 多层防腐涂层包括纳米级粘附层,粘合层上自组装单层(SAM)。 保护涂层覆盖包括金属扩散阻挡层侧壁的传感器接合焊盘。
-