公开(公告)号：US20210159099A1

公开(公告)日：2021-05-27

申请号：US17167121

申请日：2021-02-04

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Takahiro YAMADA ,  Makoto ABE ,  Kazuhiko FUSE ,  Jun WATANABE ,  Shinji MIYAWAKI

IPC: H01L21/67 ,  H01L21/265 ,  H01L21/324 ,  H01L21/687 ,  H05B3/00

Abstract: A ring support is attached to an inner wall surface of a chamber that houses a semiconductor wafer to support a susceptor. When the semiconductor wafer is placed on the susceptor, an inner space of the chamber is separated into an upper space and a lower space. Particles are likely to accumulate on a lower chamber window as a floor part of the chamber. However, since the upper space and the lower space are separated, the semiconductor wafer can be prevented from being contaminated by the particles flowing into the upper space and adhering to a surface of the semiconductor wafer even when the particles on the lower chamber window are blown up by irradiation with flash light.

公开(公告)号：US20180076062A1

公开(公告)日：2018-03-15

申请号：US15649052

申请日：2017-07-13

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Takahiro YAMADA ,  Makoto ABE ,  Kazuhiko FUSE ,  Jun WATANABE ,  Shinji MIYAWAKI

IPC: H01L21/67 ,  H01L21/324 ,  H01L21/265 ,  H01L21/687 ,  H05B3/00

CPC classification number: H01L21/67115 ,  H01L21/265 ,  H01L21/324 ,  H01L21/67248 ,  H01L21/68757 ,  H05B3/0047

Abstract: A ring support is attached to an inner wall surface of a chamber that houses a semiconductor wafer to support a susceptor. When the semiconductor wafer is placed on the susceptor, an inner space of the chamber is separated into an upper space and a lower space. Particles are likely to accumulate on a lower chamber window as a floor part of the chamber. However, since the upper space and the lower space are separated, the semiconductor wafer can be prevented from being contaminated by the particles flowing into the upper space and adhering to a surface of the semiconductor wafer even when the particles on the lower chamber window are blown up by irradiation with flash light.