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公开(公告)号：US11990887B2
公开(公告)日：2024-05-21
申请号：US17230186
申请日：2021-04-14
发明人： Ryuta Nishizawa , Shinya Aoki , Atsushi Matsuo
CPC分类号： H03H9/1021 , H03H9/0519 , H03H9/215
摘要： The vibrator device includes a vibrator element, a relay substrate, a base, an element-side bonding member for bonding the vibrator element and the relay substrate to each other, and a base-side bonding member for bonding the base and the relay substrate to each other. Further, the element-side bonding member has a first bonding member and s second bonding member arranged side by side along an A axis. Further, an X axis of a first quartz crystal substrate provided to the vibrator element is parallel to the A axis, and a second quartz crystal substrate provided to the relay substrate is a Z-cut quartz crystal substrate.
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公开(公告)号：US20240113691A1
公开(公告)日：2024-04-04
申请号：US18475685
申请日：2023-09-27
摘要： A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as an element formation region, a region where the first groove is formed is referred to as a first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a second protective film formation step of forming, in the first groove formation region, a second protective film having a lower etching rate than the first protective film, a third protective film formation step of forming a third protective film in a region of the element formation region other than the first groove formation region and the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, the second protective film, and the third protective film.
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公开(公告)号：US11916538B2
公开(公告)日：2024-02-27
申请号：US17152128
申请日：2021-01-19
CPC分类号： H03H9/19 , H03H9/0509 , H03H9/1021
摘要： A vibrator device includes a vibrating body having obverse and reverse principal surfaces and a side surface connecting the obverse and reverse principal surfaces to each other, a package configured to house the vibrating body, and a bonding material configured to fix the vibrating body to the package, wherein the vibrating body has a coupling part including a recess recessed from the side surface toward a center of the principal surfaces, and a protrusion protruding from a side surface of the recess, the protrusion is one of breaking-off parts with which a plurality of the vibrating bodies is broken off from a wafer to which the plurality of the vibrating bodies is coupled, and the bonding material has contact with a side surface of the protrusion in the recess.
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公开(公告)号：US20240014798A1
公开(公告)日：2024-01-11
申请号：US18347856
申请日：2023-07-06
CPC分类号： H03H9/0547 , H03H9/1021 , H03H9/19
摘要： A resonator device includes: a resonator; an integrated circuit device configured to oscillate the resonator and to generate an oscillation signal; a container accommodating the resonator and the integrated circuit device; and a metal bump bonded to the integrated circuit device and electrically coupling the integrated circuit device and the container. The integrated circuit device includes a pad bonded to the metal bump, and a circuit disposed at a position overlapping the metal bump in a plan view of the pad, and W1/W2≥1.08, where W1 represents a width of the pad, and W2 represents a width of the metal bump.
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公开(公告)号：US20230145942A1
公开(公告)日：2023-05-11
申请号：US17983639
申请日：2022-11-09
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/13 , H03H3/02 , H03H2003/026
摘要： A vibration element includes a vibrating part, and a support part which is coupled to the vibrating part to support the vibrating part, wherein the vibrating part and the support part have a first surface and a second surface having a front and back relationship with the first surface, a first electrode is disposed on the first surface, the first electrode includes a first layer as a foundation layer, and a second layer as an upper layer of the first layer, when performing zoning into a first area where the first electrode is not disposed, a second area where the first layer and the second layer are stacked on one another, and a third area where the first layer is formed, identification symbols formed of two or more of the first to third areas are disposed, and an identification code formed of a plurality of the identification symbols is provided.
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6.发明授权公开(公告)号：US11196406B2
公开(公告)日：2021-12-07
申请号：US16201213
申请日：2018-11-27
IPC分类号： H03H9/13 , H03H3/04 , H03H9/02 , H03H9/05 , H03H9/19 , H03H9/10 , B60R16/03 , H04N5/225 , G06F1/16
摘要： A vibrator device includes abase, a circuit element that is attached to the base, and a vibrator element that is arranged at an active surface of the circuit element and is attached to the circuit element, and the circuit element includes a terminal for frequency adjustment that is used for frequency adjustment of the vibrator element and is disposed in a region that does not overlap the vibrator element when viewed in a plan view of the active surface.
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公开(公告)号：US11075613B2
公开(公告)日：2021-07-27
申请号：US16202503
申请日：2018-11-28
摘要： A vibrator device includes a base, a relay substrate that is supported by the base, and a vibrator element that is supported by the relay substrate. In addition, the vibrator element includes a vibration substrate formed of a piezoelectric single-crystalline body and an excitation electrode disposed on the vibration substrate. In addition, the relay substrate includes a substrate formed of the piezoelectric single-crystalline body. A crystal axis of the substrate and a crystal axis of the vibration substrate are shifted from each other.
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公开(公告)号：US10794778B2
公开(公告)日：2020-10-06
申请号：US15839042
申请日：2017-12-12
IPC分类号： H01L41/107 , G01L1/16 , G01L1/10 , G01C19/5607 , G01C19/5621 , G01C19/5614 , H01L41/09
摘要： A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.
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公开(公告)号：US10302430B2
公开(公告)日：2019-05-28
申请号：US15388001
申请日：2016-12-22
IPC分类号： G01C19/5628 , B81B3/00
摘要： An electronic device includes a vibration element having a detection signal electrode and a drive signal electrode, an IC disposed so as to be opposed to the vibration element, a first wiring pattern located between the IC and the vibration element, and electrically connected to the drive signal electrode, and a shield wiring pattern located on the vibration element side of the first wiring pattern, and electrically connected to a constant potential (ground).
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公开(公告)号：US10295346B2
公开(公告)日：2019-05-21
申请号：US14886681
申请日：2015-10-19
发明人： Seiichiro Ogura , Ryuta Nishizawa
IPC分类号： G01C19/5705
摘要： A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.
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