-
公开(公告)号：US20220314621A1
公开(公告)日：2022-10-06
申请号：US17656768
申请日：2022-03-28
发明人： Harunobu KOIKE , Masao NAKAYAMA , Toshihiro SHIMIZU , Yasushi YAMAZAKI , Osamu TONOMURA , Tatsuo SAWASAKI , Chihiro NISHI
IPC分类号： B41J2/14 , H01L41/09 , H01L41/187
摘要： A substrate, a diaphragm, and a piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a second layer disposed between the first layer and the piezoelectric actuator, and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer disposed between the second layer and the piezoelectric actuator and containing zirconium as a constituent element, and a fourth layer containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer on a piezoelectric actuator side.
-
公开(公告)号：US20210362501A1
公开(公告)日：2021-11-25
申请号：US17322204
申请日：2021-05-17
发明人： Toshihiro SHIMIZU , Harunobu KOIKE , Takanori AIMONO , Masao NAKAYAMA , Tatsuo SAWASAKI , Chihiro NISHI , Noritaka MOCHIZUKI , Yasushi YAMAZAKI , Osamu TONOMURA
摘要： A liquid ejection head includes: a piezoelectric body; an vibration plate to be vibrated by a drive of the piezoelectric body; and a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by an vibration of the vibration plate; the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order; and the vibration plate includes: a first layer containing silicon as a constituent element, a second layer which is disposed between the first layer and the piezoelectric body and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum, and a third layer which is disposed between the second layer and the piezoelectric body and which contains zirconium as a constituent element.
-
公开(公告)号：US20220324231A1
公开(公告)日：2022-10-13
申请号：US17656763
申请日：2022-03-28
IPC分类号： B41J2/14 , H01L41/053 , H01L41/09 , H01L41/23
摘要： A substrate having a recessed portion, a diaphragm, and a piezoelectric actuator are provided, the diaphragm includes a first layer containing silicon as a constituent element, and a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a laminated side surface of the first layer and the third layer is covered with a moisture-resistant protective film containing at least one selected from the group made of oxide, nitride, metal, and diamond-like carbon.
-
公开(公告)号：US20220363058A1
公开(公告)日：2022-11-17
申请号：US17662813
申请日：2022-05-10
发明人： Harunobu KOIKE , Tatsuo SAWASAKI
摘要： A piezoelectric device includes a substrate, a diaphragm; and a piezoelectric actuator, in which the substrate, the diaphragm, and the piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one impurity element selected from the group consisting of a metal, a metalloid, and a semiconductor other than silicon and zirconium, as a constituent element, and the impurity element diffuses into the third layer.
-
公开(公告)号：US20230339229A1
公开(公告)日：2023-10-26
申请号：US18342240
申请日：2023-06-27
发明人： Harunobu KOIKE , Tatsuo SAWASAKI , Masao NAKAYAMA , Chihiro NISHI , Toshihiro SHIMIZU , Yasushi YAMAZAKI
CPC分类号： B41J2/14233 , B41J2/14201 , H10N30/2047 , H10N30/10513 , B41J2002/14258 , B41J2202/03
摘要： A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.
-
公开(公告)号：US20220363057A1
公开(公告)日：2022-11-17
申请号：US17662798
申请日：2022-05-10
摘要： The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.012 秒)
