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公开(公告)号：US20220063273A1
公开(公告)日：2022-03-03
申请号：US17460573
申请日：2021-08-30
发明人： Toshihiro SHIMIZU
摘要： A piezoelectric device includes a piezoelectric body, a vibration plate that vibrates when the piezoelectric body is driven, a first electrode positioned between the piezoelectric body and the vibration plate, and a second electrode positioned to be separated from the first electrode by the piezoelectric body. The piezoelectric body has an active portion that is a part sandwiched between the first electrode and the second electrode in a first direction along a thickness direction of the piezoelectric body, and a change width of a dC/dV value, which represents a change in capacitance with respect to a change in a voltage applied along a second direction orthogonal to the first direction, from one end of the active portion on a side of the first electrode to the other end of the active portion on a side of the second electrode in the first direction is 10% or less.
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公开(公告)号：US20210060948A1
公开(公告)日：2021-03-04
申请号：US17005490
申请日：2020-08-28
IPC分类号： B41J2/14
摘要： A liquid ejecting head including a flow path forming substrate in which a pressure chamber is formed, a diaphragm, and a piezoelectric actuator. The piezoelectric actuator includes an active portion in which a piezoelectric layer is interposed between a first electrode and a second electrode. The active portion, in plan view, overlaps at least a portion of the pressure chamber and is provided so as to extend to an outside of the pressure chamber. The pressure chamber is formed so that, the closer to the piezoelectric actuator in a layered direction of the flow path forming substrate and the diaphragm, a width of the pressure chamber in a direction intersecting the layered direction becomes smaller.
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公开(公告)号：US20170067143A1
公开(公告)日：2017-03-09
申请号：US15258475
申请日：2016-09-07
发明人： Masao NAKAYAMA , Eiju HIRAI , Toshihiro SHIMIZU , Motoki TAKABE , Eiji OSAWA
CPC分类号： C23C14/185 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , C22F1/14 , C22F1/183 , C23C14/3414 , C23C14/5806 , H01L41/0477 , H01L41/0973 , H01L41/29
摘要： A method of manufacturing a piezoelectric element provided with first electrodes, a piezoelectric body layer, and a second electrode including a first platinum layer and second platinum layer, in which the first platinum layer having compression stress is formed on the piezoelectric body layer, which is provided on the first electrodes, using a sputtering technique, and the second platinum layer having tensile stress, is formed on the first platinum layer using a sputtering technique with a lower sputtering power than that when the first platinum layer is formed.
摘要翻译： 一种制造压电元件的方法，该压电元件设置有第一电极，压电体层和包括第一铂层和第二铂层的第二电极，其中在压电体层上形成具有压应力的第一铂层， 使用溅射技术，使用溅射技术在第一铂层上形成具有拉伸应力的第二铂层，并且使用溅射功率低于形成第一铂层时的溅射功率。
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4.发明申请公开(公告)号：US20160293826A1
公开(公告)日：2016-10-06
申请号：US15076971
申请日：2016-03-22
发明人： Motoki TAKABE , Eiju HIRAI , Toshihiro SHIMIZU , Naoto YOKOYAMA , Eiji OSAWA
IPC分类号： H01L41/047 , H01L41/083 , B41J2/14 , H01L41/187
CPC分类号： H01L41/1876 , B41J2/14233 , B41J2/1609 , B41J2/161 , B41J2/1612 , B41J2/1618 , B41J2/1623 , B41J2/1626 , B41J2002/14241 , B41J2002/14362 , B41J2202/03 , H01L41/0471 , H01L41/0805 , H01L41/083 , H01L41/09 , H01L41/0973 , H01L41/27 , H01L41/277
摘要： The piezoelectric body is configured to have a layered structure such that a plurality of unit layers are stacked in a film thickness direction, and each of the unit layers is formed of a first layer on which the displacement is relatively easy to occur, and a second layer which has a high concentration of Zr as compared with the first layer. In addition, when composition ratio Ti/(Zr+Ti) of Zr to Ti in each of the first layer and the second layer is set as Cr1 and Cr2, the composition ratio of each layer is adjusted so as to satisfy the following conditions (1) to (3). 0.41≦Cr1≦0.81 (1) 0.1≦Cr1−Cr2≦0.3 (2) Cr1>Cr2 (3)
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公开(公告)号：US20230339229A1
公开(公告)日：2023-10-26
申请号：US18342240
申请日：2023-06-27
发明人： Harunobu KOIKE , Tatsuo SAWASAKI , Masao NAKAYAMA , Chihiro NISHI , Toshihiro SHIMIZU , Yasushi YAMAZAKI
CPC分类号： B41J2/14233 , B41J2/14201 , H10N30/2047 , H10N30/10513 , B41J2002/14258 , B41J2202/03
摘要： A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.
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公开(公告)号：US20230210011A1
公开(公告)日：2023-06-29
申请号：US18069273
申请日：2022-12-21
IPC分类号： H10N30/00 , H10N30/20 , H10N30/853 , B41J2/14
CPC分类号： H01L41/0815 , H01L41/0973 , H01L41/1873 , B41J2/14201 , B41J2002/14306
摘要： A piezoelectric element includes: a first electrode; an oxide layer formed on the first electrode; a piezoelectric layer formed on the oxide layer and containing potassium, sodium, and niobium; and a second electrode formed on the piezoelectric layer. When a potential difference of 10 V is applied between the first electrode and the second electrode, a current density of a leak current differs by 10,000 times or more between a case in which the first electrode is set at a high potential and a case in which the second electrode is set at a high potential.
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公开(公告)号：US20220363057A1
公开(公告)日：2022-11-17
申请号：US17662798
申请日：2022-05-10
摘要： The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.
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公开(公告)号：US20190283421A1
公开(公告)日：2019-09-19
申请号：US16351658
申请日：2019-03-13
发明人： Hiromu MIYAZAWA , Toshihiro SHIMIZU
摘要： A liquid ejecting head includes: a nozzle from which a liquid is ejected; a communication passage that is in communication with the nozzle; a first pressure compartment that is connected to the communication passage through a first passage; a second pressure compartment that is connected to the communication passage through a second passage; a first drive element that changes pressure of the first pressure compartment; and a second drive element that changes pressure of the second pressure compartment.
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公开(公告)号：US20190193401A1
公开(公告)日：2019-06-27
申请号：US16225107
申请日：2018-12-19
发明人： Takashi KASAHARA , Masao NAKAYAMA , Takeshi SAITO , Yoshihiro HOKARI , Toshihiro SHIMIZU , Naoto YOKOYAMA
CPC分类号： B41J2/14233 , B41J2/1433 , B41J2/161 , B41J2/162 , B41J2/1623 , B41J2/1626 , B41J2002/14241
摘要： A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.
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公开(公告)号：US20170096006A1
公开(公告)日：2017-04-06
申请号：US15278673
申请日：2016-09-28
发明人： Masao NAKAYAMA , Eiju HIRAI , Naoto YOKOYAMA , Motoki TAKABE , Toshihiro SHIMIZU
IPC分类号： B41J2/14 , H01L41/314 , H01L41/187 , H01L41/047 , H01L41/08
CPC分类号： B41J2/14209 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , H01L41/0471 , H01L41/0472 , H01L41/0477 , H01L41/0478 , H01L41/0805 , H01L41/0815 , H01L41/1876 , H01L41/314 , H01L41/319 , H01L41/332
摘要： Provided is a piezoelectric element including: a first electrode; a piezoelectric layer which is provided over the first electrode; and a second electrode provided on a side of the piezoelectric layer opposite to the first electrode, in which the second electrode includes a first layer which is provided on the piezoelectric layer side, and a second layer which is provided on a side of the first layer opposite to the piezoelectric layer, and the second layer does not contain platinum and covers an end portion of the first layer.
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