公开(公告)号：US20150022275A1

公开(公告)日：2015-01-22

申请号：US14330184

申请日：2014-07-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Akihiko EBINA ,  Tsuyoshi TABATA ,  Hidekazu YANAGISAWA

IPC: H03H9/17 ,  H03B5/32 ,  H01L41/047

CPC classification number: H03H9/17 ,  H01L41/0472 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/094 ,  H03B5/32 ,  H03H9/1014 ,  H03H9/21

Abstract: A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO2, and the material of the piezoelectric body contains AlN.

Abstract translation: 振动元件包括基部，从基部延伸的振动臂，设置在振动臂上的第一电极，设置在第一电极上方的第二电极，布置在第一电极和第二电极之间的压电体， 布置在第一电极和压电体之间的绝缘膜，其中第一电极的材料含有TiN，绝缘膜的材料含有SiO 2，并且压电体的材料含有AlN。