公开(公告)号：US20180312395A1

公开(公告)日：2018-11-01

申请号：US15961564

申请日：2018-04-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Akihiko EBINA ,  Osamu KAWAUCHI ,  Yoshihiko YOKOYAMA

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81B2207/096 ,  B81C1/00301

Abstract: A MEMS element includes a surface silicon layer on which an element is formed and on which a first electrode and a second electrode as element electrodes and an electrode pad connected to the first electrode and the second electrode are disposed, and in which a first wiring through-hole is disposed at a position overlapping with the electrode pad of the surface silicon layer and a wiring electrode electrically connected to the electrode pad is disposed in the first wiring through-hole, in plan view.

公开(公告)号：US20150340968A1

公开(公告)日：2015-11-26

申请号：US14700756

申请日：2015-04-30

Applicant: Seiko Epson Corporation

Inventor： Shogo INABA ,  Akihiko EBINA

IPC: H02N1/00

CPC classification number: B81C1/00293 ,  B81B3/007 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81C2203/0136 ,  B81C2203/0145

Abstract: A MEMS structure includes: a substrate; a lower electrode disposed on the substrate; an upper electrode including a movable portion disposed facing and spaced from the lower electrode; and a reinforcing portion disposed in the upper electrode so as to extend along an extending direction of the movable portion, the reinforcing portion being composed of a material having a higher Young's modulus than the upper electrode.

Abstract translation: MEMS结构包括：基板; 设置在所述基板上的下电极; 上部电极，其包括面向并与所述下部电极间隔开的可动部; 以及加强部，其设置在所述上​​部电极中，以沿着所述可动部的延伸方向延伸，所述加强部由比所述上部电极的杨氏模量高的材料构成。

公开(公告)号：US20150217992A1

公开(公告)日：2015-08-06

申请号：US14602827

申请日：2015-01-22

Applicant: SEIKO EPSON CORPORATION

Inventor： Akihiko EBINA

IPC: B81B7/00 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B7/0041 ,  B81B3/0021 ,  B81B2201/0271 ,  B81B2203/04 ,  B81B2207/015 ,  B81B2207/095 ,  B81C1/00293 ,  B81C2203/0136 ,  B81C2203/0778

Abstract: A MEMS device is provided in which, in order to suppress generation of a gas from an inner wall of a space in which a MEMS portion is disposed, the MEMS portion is disposed in a space constituted by at least a silicon nitride film and a silicon film, the silicon film has a first hole, the first hole is filled with a metal film or a metal silicide, and an airtight structure is formed by the metal film or the metal silicide, the silicon nitride film, and the silicon film.

Abstract translation: 提供了一种MEMS器件，其中为了抑制从其中设置MEMS部分的空间的内壁产生气体，MEMS部分设置在至少由氮化硅膜和硅构成的空间中 膜，硅膜具有第一孔，第一孔填充有金属膜或金属硅化物，并且通过金属膜或金属硅化物，氮化硅膜和硅膜形成气密结构。

公开(公告)号：US20200067484A1

公开(公告)日：2020-02-27

申请号：US16551137

申请日：2019-08-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Osamu KAWAUCHI ,  Akihiko EBINA

IPC: H03H9/205 ,  H03H9/05 ,  H03H9/10 ,  H03H3/04 ,  B23K26/362

Abstract: A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.

公开(公告)号：US20150022275A1

公开(公告)日：2015-01-22

申请号：US14330184

申请日：2014-07-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Akihiko EBINA ,  Tsuyoshi TABATA ,  Hidekazu YANAGISAWA

IPC: H03H9/17 ,  H03B5/32 ,  H01L41/047

CPC classification number: H03H9/17 ,  H01L41/0472 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/094 ,  H03B5/32 ,  H03H9/1014 ,  H03H9/21

Abstract: A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO2, and the material of the piezoelectric body contains AlN.

Abstract translation: 振动元件包括基部，从基部延伸的振动臂，设置在振动臂上的第一电极，设置在第一电极上方的第二电极，布置在第一电极和第二电极之间的压电体， 布置在第一电极和压电体之间的绝缘膜，其中第一电极的材料含有TiN，绝缘膜的材料含有SiO 2，并且压电体的材料含有AlN。

公开(公告)号：US20200338984A1

公开(公告)日：2020-10-29

申请号：US16857310

申请日：2020-04-24

Applicant: Seiko Epson Corporation

Inventor： Junichi TAKEUCHI ,  Akira MIZUGUCHI ,  Akihiko EBINA ,  Takashi YAMAZAKI

IPC: B60K35/00 ,  G10K9/12

Abstract: A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.

公开(公告)号：US20150315011A1

公开(公告)日：2015-11-05

申请号：US14698034

申请日：2015-04-28

Applicant: Seiko Epson Corporation

Inventor： Shogo INABA ,  Akihiko EBINA ,  Takuya KINUGAWA

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/001 ,  B81B3/0013 ,  B81B3/0021 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C1/0015 ,  B81C2203/0136 ,  H01H1/0036 ,  H01H35/14 ,  H01H35/24 ,  H01H2059/0072

Abstract: A MEMS structure includes: a substrate; a lower electrode disposed above the substrate; an upper electrode including a movable portion disposed facing and spaced from the lower electrode; and a projection projecting from a surface of the movable portion on a side facing the lower electrode, the projection being composed of a material different from that of the movable portion.

Abstract translation: MEMS结构包括：基板; 设置在所述基板上方的下电极; 上部电极，其包括面向并与所述下部电极间隔开的可动部; 以及在与所述下电极相对的一侧从所述可动部的表面突出的突起，所述突起由与所述可动部不同的材料构成。