公开(公告)号：US20140239776A1

公开(公告)日：2014-08-28

申请号：US14166029

申请日：2014-01-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI

IPC: H03H9/21

CPC classification number: H03H9/21 ,  H03H9/0542 ,  H03H9/0547

Abstract: A tuning fork type vibrator element, as a vibrator element, includes a base formed on a plane including a first axis and a second axis orthogonal to the first axis, a connection portion extending in a first axis direction from the base, with a thickness thereof being smaller than that of the base and a vibrating arm extending in the first axis direction from one end portion of the connection portion, with a thickness thereof being the same as that of the connection portion, in which the vibrating arm performs flexural vibration along a vertical direction with respect to the plane, and in which the connection portion is provided such that a relationship between a length L2 in the first axis direction of the connection portion and a length L1 in the first axis direction of the vibrating arm falls within a range of L1/15≦L2≦L1.

Abstract translation: 作为振子元件的音叉式振动元件包括形成在包括第一轴线和与第一轴线正交的第二轴线的平面上的基座，从底座沿第一轴线方向延伸的连接部分，其厚度 小于基座的长度的振动臂和从连接部的一个端部沿第一轴线方向延伸的振动臂，其厚度与连接部的厚度相同，其中振动臂沿着连接部的一端部进行弯曲振动 并且其中连接部分设置成使得连接部分的第一轴线方向上的长度L2与振动臂的第一轴线方向上的长度L1之间的关系落在一个范围内 的L1 / 15＆nlE; L2＆nlE; L1。

公开(公告)号：US20230109944A1

公开(公告)日：2023-04-13

申请号：US18081084

申请日：2022-12-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/10 ,  G01C19/5621

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20180074119A1

公开(公告)日：2018-03-15

申请号：US15558771

申请日：2016-02-03

Applicant: Seiko Epson Corporation

Inventor： Daisuke KIRIHARA ,  Masami MAEDA ,  Toshioki SHIMOJIMA ,  Takashi YAMAZAKI

IPC: G01R31/28 ,  H01L21/673

CPC classification number: G01R31/2893 ,  G01R31/2891 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67288 ,  H01L21/67356 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67389

Abstract: An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.

公开(公告)号：US20180312395A1

公开(公告)日：2018-11-01

申请号：US15961564

申请日：2018-04-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Akihiko EBINA ,  Osamu KAWAUCHI ,  Yoshihiko YOKOYAMA

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81B2207/096 ,  B81C1/00301

Abstract: A MEMS element includes a surface silicon layer on which an element is formed and on which a first electrode and a second electrode as element electrodes and an electrode pad connected to the first electrode and the second electrode are disposed, and in which a first wiring through-hole is disposed at a position overlapping with the electrode pad of the surface silicon layer and a wiring electrode electrically connected to the electrode pad is disposed in the first wiring through-hole, in plan view.

公开(公告)号：US20240297637A1

公开(公告)日：2024-09-05

申请号：US18592675

申请日：2024-03-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Takuro KOBAYASHI ,  Juichiro MATSUZAWA

IPC: H03H9/215 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10

CPC classification number: H03H9/215 ,  H03H9/02157 ,  H03H9/0509 ,  H03H9/105

Abstract: A resonator device includes a resonator element, and a base to which the resonator element is fixed via a conductive adhesive. The resonator element includes a base portion, a vibrating arm that is coupled to the base portion and that extends in a first direction, and a support arm that is arranged with the vibrating arm in a second direction orthogonal to the first direction, that extends in the first direction, and that is fixed to the base by the conductive adhesive. 0.2×L1≤Da≤0.4×L1, in which a position at a base end of the support arm is P0, a central position of the conductive adhesive is Pa, and a length between P0 and Pa is Da in the first direction of the support arm.

公开(公告)号：US20200067484A1

公开(公告)日：2020-02-27

申请号：US16551137

申请日：2019-08-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Osamu KAWAUCHI ,  Akihiko EBINA

IPC: H03H9/205 ,  H03H9/05 ,  H03H9/10 ,  H03H3/04 ,  B23K26/362

Abstract: A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.

公开(公告)号：US20190229706A1

公开(公告)日：2019-07-25

申请号：US16253712

申请日：2019-01-22

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  H03H3/04 ,  G01C19/5607

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20150022275A1

公开(公告)日：2015-01-22

申请号：US14330184

申请日：2014-07-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi YAMAZAKI ,  Akihiko EBINA ,  Tsuyoshi TABATA ,  Hidekazu YANAGISAWA

IPC: H03H9/17 ,  H03B5/32 ,  H01L41/047

CPC classification number: H03H9/17 ,  H01L41/0472 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/094 ,  H03B5/32 ,  H03H9/1014 ,  H03H9/21

Abstract: A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO2, and the material of the piezoelectric body contains AlN.

Abstract translation: 振动元件包括基部，从基部延伸的振动臂，设置在振动臂上的第一电极，设置在第一电极上方的第二电极，布置在第一电极和第二电极之间的压电体， 布置在第一电极和压电体之间的绝缘膜，其中第一电极的材料含有TiN，绝缘膜的材料含有SiO 2，并且压电体的材料含有AlN。

公开(公告)号：US20240297636A1

公开(公告)日：2024-09-05

申请号：US18592642

申请日：2024-03-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Takuro KOBAYASHI ,  Akinori YAMADA ,  Takashi YAMAZAKI ,  Osamu KAWAUCHI

IPC: H03H9/215 ,  H03H9/19

CPC classification number: H03H9/215 ,  H03H9/19

Abstract: A resonator element includes a base part and a vibrating arm. The vibrating arm includes an arm part and a wide part whose width is larger than that of the arm part. In the arm part, a first groove is formed on the first surface side, and a second groove is formed on the second surface side. 30 μm≤Wa≤75 μm, in which a width of the arm part is Wa, a thickness T between the first surface and the second surface of the arm part satisfies 110 μm≤T≤150 μm. 0.884≤(t1+t2)/T≤0.990, in which a depth of the first groove is t1, and a depth of the second groove is t2. 0.0056≤Wb/T≤0.0326, in which a width of the first surface arranged across the first groove and a width of the second surface arranged across the second groove are Wb. A length L1 of the vibrating arm satisfies L1≤1000 μm.

公开(公告)号：US20240258981A1

公开(公告)日：2024-08-01

申请号：US18426460

申请日：2024-01-30

Applicant: SEIKO EPSON CORPORATION

Inventor： Osamu KAWAUCHI ,  Takashi YAMAZAKI ,  Takuro KOBAYASHI

IPC: H03H3/02 ,  H03H9/215

CPC classification number: H03H3/02 ,  H03H9/215 ,  H03H2003/026

Abstract: A method of manufacturing a vibration element includes: manufacturing, by wet etching, a piezoelectric substrate including a vibration element, a frame portion, and a coupling portion that couples the frame portion and the vibration element; and folding the vibration element at the coupling portion and separating the vibration element from the frame portion. In the manufacturing of the piezoelectric substrate by the wet etching, the coupling portion is formed with a first groove portion, and a first protruding portion and a second protruding portion. The first protruding portion has a first outer shape side that defines an outer shape of the coupling portion and a second outer shape side that defines a boundary between the first protruding portion and the first groove portion, and is formed in a shape in which a distance between the first outer shape side and the second outer shape side decreases as a distance from the outer shape side of the vibration element increases. The second protruding portion has a third outer shape side that defines the outer shape of the coupling portion and a fourth outer shape side that defines a boundary between the second protruding portion and the first groove portion, and is formed in a shape in which a distance between the third outer shape side and the fourth outer shape side decreases as a distance from the outer shape side of the vibration element increases.