公开(公告)号：US20190189471A1

公开(公告)日：2019-06-20

申请号：US16224891

申请日：2018-12-19

Applicant: SEMES CO., LTD.

Inventor： BUYOUNG JUNG ,  JONGHAN KIM ,  YOUNG JIN JANG ,  JIN TACK YU ,  YOUNGJUN CHOI ,  DAEHUN KIM ,  BYUNGSUN BANG ,  JONGHYEON WOO ,  HEEHWAN KIM ,  CHEOL-YONG SHIN ,  GUI SU PARK

IPC: H01L21/67 ,  H01L21/683

Abstract: Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.