公开(公告)号：US20250164898A1

公开(公告)日：2025-05-22

申请号：US18884071

申请日：2024-09-12

Applicant: SEMES CO., LTD.

Inventor： Ki Won HAN ,  Doo Hyun BAEK ,  Hee Chan KIM ,  Tae Kyung KONG ,  Dong Kyum KIM

IPC: G03F7/00

Abstract: A storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage portion disposed on the outside of the transfer portion, the storage portion having a storage space therein, and a transfer target portion in which a substrate is transferred by the transfer portion. A pair of the storage and transfer units are provided. The pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween. A substrate loading portion is disposed on one side of the storage and transfer units.