公开(公告)号：US20250164898A1

公开(公告)日：2025-05-22

申请号：US18884071

申请日：2024-09-12

Applicant: SEMES CO., LTD.

Inventor： Ki Won HAN ,  Doo Hyun BAEK ,  Hee Chan KIM ,  Tae Kyung KONG ,  Dong Kyum KIM

IPC: G03F7/00

Abstract: A storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage portion disposed on the outside of the transfer portion, the storage portion having a storage space therein, and a transfer target portion in which a substrate is transferred by the transfer portion. A pair of the storage and transfer units are provided. The pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween. A substrate loading portion is disposed on one side of the storage and transfer units.

公开(公告)号：US20230360951A1

公开(公告)日：2023-11-09

申请号：US18352467

申请日：2023-07-14

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Kiwon HAN ,  Jin Sung SUN

IPC: H01L21/683 ,  B25J15/06 ,  B25J11/00 ,  B25J15/00 ,  H01L21/687

CPC classification number: H01L21/6838 ,  B25J15/0683 ,  B25J11/0095 ,  B25J15/0014 ,  H01L21/68707

Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.

公开(公告)号：US20140091077A1

公开(公告)日：2014-04-03

申请号：US14039422

申请日：2013-09-27

Applicant: Semes Co., Ltd.

Inventor： Tae Kyung KONG

IPC: H01L21/67 ,  C25D5/02

CPC classification number: H01L21/67103 ,  C23C18/1603 ,  C23C18/1608 ,  C23C18/1651 ,  C23C18/1653 ,  C23C18/1689 ,  C23C18/1879 ,  C25D5/02 ,  C25D5/022

Abstract: Provided is a supporting unit. The supporting unit includes: a supporting plate including a substrate on a top surface thereof; and a heater having a predetermined pattern at a bottom surface of the supporting plate and heating the supporting plate, wherein the heater includes: a first metal plating layer applied on the bottom surface of the supporting plate along the predetermined pattern; an anti-oxidation layer of a conductive material applied on the first metal plating layer along the predetermined pattern; and a second metal plating layer of a conductive material applied on the anti-oxidation layer in a portion of the pattern.

Abstract translation: 提供支撑单元。 支撑单元包括：支撑板，其在其顶表面上包括基板; 以及在所述支撑板的底面具有预定图案并加热所述支撑板的加热器，其中所述加热器包括：沿所述预定图案施加在所述支撑板的底表面上的第一金属镀层; 沿预定图案施加在第一金属镀层上的导电材料的抗氧化层; 以及在图案的一部分中在抗氧化层上施加的导电材料的第二金属镀层。

公开(公告)号：US20220379485A1

公开(公告)日：2022-12-01

申请号：US17679279

申请日：2022-02-24

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Jin Sung SUN

IPC: B25J9/16 ,  B25J11/00 ,  B25J5/02

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a plurality of treating chambers performing a respective treatment on a substrate therein; a transfer chamber having a robot transferring the substrate between the plurality of treating chambers; a detection unit mounted on the robot and configured to detect a substrate state; and a controller for controlling the detection unit, wherein the detection unit comprises: an imaging member for imaging the substrate; and a driving member for moving the imaging member, and wherein the controller controls the detection unit to image and store an image of the substrate at an optimal position and determines whether an image of the substrate is a normal state based on the image obtained in the optimal position, the optimal position determined based on a process variable of the treating chamber.

公开(公告)号：US20210111062A1

公开(公告)日：2021-04-15

申请号：US17065641

申请日：2020-10-08

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Kiwon HAN ,  Jin Sung SUN

IPC: H01L21/683 ,  B25J15/06 ,  H01L21/687 ,  B25J15/00 ,  B25J11/00

Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.

公开(公告)号：US20210028030A1

公开(公告)日：2021-01-28

申请号：US16935602

申请日：2020-07-22

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Jin Sung SUN ,  Kiwon HAN

IPC: H01L21/67 ,  B65G47/90 ,  H01L21/687 ,  G03F7/16

Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.