公开(公告)号：US20250164898A1

公开(公告)日：2025-05-22

申请号：US18884071

申请日：2024-09-12

Applicant: SEMES CO., LTD.

Inventor： Ki Won HAN ,  Doo Hyun BAEK ,  Hee Chan KIM ,  Tae Kyung KONG ,  Dong Kyum KIM

IPC: G03F7/00

Abstract: A storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage portion disposed on the outside of the transfer portion, the storage portion having a storage space therein, and a transfer target portion in which a substrate is transferred by the transfer portion. A pair of the storage and transfer units are provided. The pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween. A substrate loading portion is disposed on one side of the storage and transfer units.

公开(公告)号：US20240392622A1

公开(公告)日：2024-11-28

申请号：US18637333

申请日：2024-04-16

Applicant: SEMES CO., LTD.

Inventor： Min Beom KIM ,  Eun Sang YOON ,  Nam Ho CHUNG ,  Doo Hyun BAEK

IPC: E05F15/72 ,  A62C2/20 ,  B66B5/02 ,  E05F15/56 ,  E05F17/00 ,  H01L21/677

Abstract: Provided are a fireproof door apparatus, a fireproof structure, and a substrate treating facility.
The fireproof door apparatus includes a fireproof shutter opening and closing a passage connecting two spaces, a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed, and a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.