公开(公告)号：US20210020478A1

公开(公告)日：2021-01-21

申请号：US16931733

申请日：2020-07-17

Applicant: SEMES CO., LTD.

Inventor： Sung Yong LEE ,  Donghyuk SEO

IPC: H01L21/67

Abstract: An apparatus for treating a substrate includes a housing having a treatment space therein, a heating plate that supports the substrate in the treatment space and that has a plurality of heating members inside, and a temperature control unit that controls the plurality of heating members to heat the substrate supported on the heating plate, in which the temperature control unit controls the plurality of heating members using a plurality of control signals with different control periods.

公开(公告)号：US20200211874A1

公开(公告)日：2020-07-02

申请号：US16726293

申请日：2019-12-24

Applicant: SEMES CO., LTD.

Inventor： Sung Yong LEE ,  Donghyuk SEO ,  Sangbok HAN ,  Tae Sub LEE

IPC: H01L21/67 ,  H01L21/324 ,  H01L21/66 ,  G03F7/20

Abstract: Disclosed is a substrate treating apparatus that includes a housing having a process space therein, a plate that supports a substrate in the housing, a heating member that is provided in the plate and that heats the substrate, a plurality of controllers that control the heating member and that have different gains, a temperature measurement member that measures temperature in the housing, and a control member that switches the plurality of controllers to cause one of the plurality of controllers to control the heating member depending on a temperature drop section, a temperature rise section, and an anneal section in the housing.

公开(公告)号：US20200381279A1

公开(公告)日：2020-12-03

申请号：US16886321

申请日：2020-05-28

Applicant: SEMES CO., LTD.

Inventor： Donghyuk SEO ,  Sung Yong LEE

IPC: H01L21/67 ,  H05B1/02 ,  G03F7/20

Abstract: An apparatus for treating a substrate includes a housing having a treatment space therein, a plate that supports the substrate in the housing, a heating unit having a heating wire that is provided inside the plate and that heats the substrate, a main temperature sensor that directly measures temperatures of the plate, and an auxiliary temperature sensor that measures temperatures of the heating wire.