公开(公告)号：US20230072272A1

公开(公告)日：2023-03-09

申请号：US17902056

申请日：2022-09-02

Applicant: SEMES CO., LTD.

Inventor： Tae Sub LEE ,  Gyu Hyun KIM ,  Sung Yong LEE ,  Dong Hyuk SEO

IPC: H01L21/67

Abstract: Provided is a heating unit including: a heating plate for heating a substrate; a heater installed in the heating plate; and a control unit for controlling the heater, in which wherein the heater includes: a first heater; and a second heater installed at a position different from a position of the first heater, and the control unit includes: a power source for transferring power to at least one of the first heater and the second heater; and a switching module for connecting the first heater and the second heater in series or connecting the first heater and the second heater in parallel.