Pressure control device and substrate treatment apparatus including the same

    公开(公告)号:US12134271B2

    公开(公告)日:2024-11-05

    申请号:US18182577

    申请日:2023-03-13

    Abstract: Provided is a pressure control device for stably controlling the internal air pressure of a reservoir. The pressure control device includes: an input terminal receiving source air pressure; an intake valve connected between the input terminal and an output terminal; an exhaust valve connected to the output terminal; a pressure sensor connected to the output terminal and generating a sensed value by sensing pressure at the output terminal; and a controller simultaneously operating the intake valve and the exhaust valve by simultaneously operating a first control loop for adjusting the degree of opening of the intake valve by comparing the sensed value with a first target value and a second control loop for adjusting the degree of opening of the exhaust valve by comparing the sensed value with a second target value.

    PROCESS MEASUREMENT APPARATUS AND METHOD
    4.
    发明公开

    公开(公告)号:US20230350438A1

    公开(公告)日:2023-11-02

    申请号:US17732553

    申请日:2022-04-29

    CPC classification number: G05D23/1927 G01K3/14 H01L21/67248 H01L21/67103

    Abstract: A process measurement apparatus and method capable of increasing production by decreasing an operating time are provided. The process measurement method is performed by a computing device, and includes receiving a plurality of sensed values from a plurality of sensors disposed in a wafer-type temperature sensor, generating a first temperature value of a first heating zone based on the plurality of sensed values, and determining a first compensation value based on a first difference value corresponding to a difference between the first temperature value and a target value, wherein a first compensation ratio between the first difference value and the first compensation value when the first difference value is a first value is different from a second compensation ratio between the first difference value and the first compensation value when the first difference value is a second value.

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