公开(公告)号：US20230350438A1

公开(公告)日：2023-11-02

申请号：US17732553

申请日：2022-04-29

Applicant: SEMES Co., Ltd.

Inventor： Yong Jun Seo ,  Sang Hyun Son ,  Sang Min Ha ,  Hyeong Jun Cho ,  Dong Ok Ahn

IPC: H01L21/67 ,  G05D23/19 ,  G01K3/14

CPC classification number: G05D23/1927 ,  G01K3/14 ,  H01L21/67248 ,  H01L21/67103

Abstract: A process measurement apparatus and method capable of increasing production by decreasing an operating time are provided. The process measurement method is performed by a computing device, and includes receiving a plurality of sensed values from a plurality of sensors disposed in a wafer-type temperature sensor, generating a first temperature value of a first heating zone based on the plurality of sensed values, and determining a first compensation value based on a first difference value corresponding to a difference between the first temperature value and a target value, wherein a first compensation ratio between the first difference value and the first compensation value when the first difference value is a first value is different from a second compensation ratio between the first difference value and the first compensation value when the first difference value is a second value.

公开(公告)号：US12240259B2

公开(公告)日：2025-03-04

申请号：US18147910

申请日：2022-12-29

Applicant: SEMES CO., LTD.

Inventor： Sang Min Ha ,  Hyeong Jun Cho ,  Jae Hong Kim ,  Sang Hyun Son ,  Young-Joo Seo

IPC: B41M5/00 ,  B41J2/01 ,  B41J2/015 ,  B41J2/21 ,  B41J19/14 ,  B41J19/20 ,  B41J29/393 ,  C09D11/30 ,  B41J3/407

Abstract: Disclosed is a substrate processing device which includes a substrate transfer part on which a transfer object is received and a jetting system part includes an ink jet body that jets and prints ink on the transfer object over an upper surface of the substrate transfer part, an ink module transfer part that transfers the ink jet body, an encoder disposed around the ink module transfer part to output a movement signal per unit movement distance of the ink module transfer part, an ink ejection controller that interworks with the ink jet body to control an ink jetting timing of the ink jet body, and a signal splitter that interworks with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the movement signal, the width of which is reset, to the ink ejection controller.

公开(公告)号：US12123903B2

公开(公告)日：2024-10-22

申请号：US17837027

申请日：2022-06-10

Applicant: SEMES CO., LTD.

Inventor： Jun Ho Oh ,  Kwang Sup Kim ,  Jae Hong Kim ,  Kyung Hun Jang ,  Young Ho Park ,  Jong Min Lee ,  Yeon Chul Song ,  Sang Min Ha ,  Ji Hoon Yoo ,  Myeong Jun Lim

IPC: G01R29/24

CPC classification number: G01R29/24

Abstract: A static electricity visualization apparatus capable of visually identifying a measured level of static electricity is provided. The static electricity visualization apparatus comprises a photographing unit for generating a first photographed image obtained by photographing a measurement target at a first distance from the measurement target in a first mode, and generating a second photographed image obtained by photographing the measurement target at a second distance from the measurement target in a second mode, a static electricity sensor for measuring a static electricity level of the measurement target at the second distance from the measurement target, a processor for matching the second photographed image with the first photographed image, and an output unit for outputting a static electricity visualization image that visualizes a static electricity level measured by the static electricity sensor on the first photographed image, wherein the static electricity visualization image comprises a color corresponding to the static electricity level of the measurement target measured by the static electricity sensor at a position where the second photographed image matches on the first photographed image.

公开(公告)号：US11756815B2

公开(公告)日：2023-09-12

申请号：US17083189

申请日：2020-10-28

Applicant: SEMES CO., LTD.

Inventor： Yong Jun Seo ,  Sang Hyun Son ,  Sang Min Ha ,  Dong Ok Ahn

IPC: H01L21/67 ,  H01L23/00 ,  H01L21/324 ,  G01P15/02 ,  G01C19/00 ,  H01L23/498

CPC classification number: H01L21/67248 ,  G01C19/00 ,  G01P15/02 ,  H01L21/324 ,  H01L21/67103 ,  H01L23/4985 ,  H01L23/562

Abstract: Disclosed is an apparatus for precisely monitoring warpage deformation of a substrate. The apparatus includes a sensing unit and a processor. The sensing unit is removably mounted on the substrate and detects information on the warpage deformation of the substrate during a treatment process performed on the substrate. The processor generates warpage state information on the basis of the warpage information detected by the sensing unit.

公开(公告)号：US11919303B2

公开(公告)日：2024-03-05

申请号：US17734080

申请日：2022-05-01

Applicant: SEMES CO., LTD.

Inventor： Sang Min Ha ,  Sang Hyun Son ,  Young Joo Seo ,  Hyeong Jun Cho ,  Jae Hong Kim

IPC: B41J2/045 ,  B41J2/07 ,  B41J2/125

CPC classification number: B41J2/04581 ,  B41J2/04518 ,  B41J2/072 ,  B41J2/125

Abstract: Provided is a jetting driver that can be used for various types of heads with minimal changes. The jetting driver includes: an image board receiving raw image data and generating image data by transforming the raw image data into a form suitable for a type of heads used; and an interface board physically separated from the image board, receiving the image data, and transmitting the image data to the heads through a plurality of channels.