公开(公告)号：US12230516B2

公开(公告)日：2025-02-18

申请号：US17515737

申请日：2021-11-01

Applicant: SEMES CO., LTD.

Inventor： Jae Oh Bang ,  Young Seo An ,  Seung Han Lee ,  Seung Hwan Lee ,  Hyun Min Kim

IPC: H01L21/67 ,  F27B17/00 ,  F27D7/02 ,  F27D99/00 ,  H01L21/324 ,  H01L21/66 ,  F27D5/00 ,  F27D19/00

Abstract: The inventive concept relates to a substrate treating apparatus including a process chamber having a first and a second body, a support unit supporting a substrate, a heating unit heats the substrate, a driver moves any one of the first body and the second body, an interval state detection unit that detects an interval state between a side wall of the first body and a side wall of the second body when the first and the second body are placed in a process location, and a controller that controls the driver and the interval state detection unit, wherein the interval state detection unit includes a pressure provision line that provides a positive pressure or a negative pressure between the side wall of the first body and the side wall of the second body, and a pressure measurement member that measures a change in a pressure of the pressure provision line.

公开(公告)号：US11789364B2

公开(公告)日：2023-10-17

申请号：US17564604

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Hyun Min Kim ,  Young Seo An

IPC: G03F7/16

CPC classification number: G03F7/16

Abstract: An apparatus for treating the substrate includes a process chamber with a treating space therein, a support member located in the treating space to support the substrate, and a gas supply unit supplying a surface-modifying gas to the treating space. The gas supply unit includes a bubbler tank provided with an accommodating space for storing a liquid alkyne-based chemical, the bubbler tanks bubbling the liquid alkyne-based chemical by supplying an inert gas to the accommodating space to generate the surface-modifying gas, a heater heating the liquid alkyne-based chemical stored in the bubbler tank at a first temperature, and a gas supply line coupled between the process chamber and the bubbler tank to supply the surface modified gas to the treating space and provided with a first valve.