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公开(公告)号:US20240347356A1
公开(公告)日:2024-10-17
申请号:US18756672
申请日:2024-06-27
发明人: Rolf Bremensdorfer , Dieter Hezler
CPC分类号: H01L21/67115 , F27B17/0025 , F27D7/02 , G01J5/10 , G01J5/58 , H01L21/67248 , H05B1/0233 , H05B3/0047 , G01J5/0007
摘要: A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece support disposed within the processing chamber, a gas delivery system configured to flow one or more process gases into the processing chamber from the a first side of the processing chamber, one or more radiative heating sources disposed on the second side of the processing chamber, one or more dielectric windows disposed between the workpiece support and the one or more radiative heating sources, a rotation system configured to rotate the one or more radiative heating sources, and a workpiece temperature measurement system configured at a temperature measurement wavelength range to obtain a measurement indicative of a temperature of a back side of the workpiece.
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2.
公开(公告)号:US12018836B2
公开(公告)日:2024-06-25
申请号:US16903388
申请日:2020-06-17
申请人: Nestec, Inc.
发明人: Jim Nester , Rick Reimlinger , Jack Clark , Frank DeSantis
CPC分类号: F23G7/068 , F24D19/00 , F27D7/02 , F27D17/004 , F27D17/008 , F27D2019/0071
摘要: An electrically controlled valve which can be operated using a programable controller. A cooperating pair of the electrically controlled valves can be used in a Regenerative Thermal Oxidizer (RTO). The electrically controlled valve has two seats, and a blade which can move between a first position contacting the first seat and a second position contacting the second seat. The blade is moved by an actuator which is controlled by a variable frequency drive (VFD). A control computer continuously monitors the operation of both valves and halts operation of the system upon detecting a fault (error). The motion of the blade is programmed such that force of impact on the seat is reduced. Once the blade is seated, a brake is engaged which maintains the stationary position while utilizing relatively low power.
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公开(公告)号:US20240183617A1
公开(公告)日:2024-06-06
申请号:US18434941
申请日:2024-02-07
发明人: Yu WANG , Peng GU , Min LI , Zhenxing LIANG
CPC分类号: F27D21/02 , F27D7/02 , F27D2007/023
摘要: The present disclosure provides a window device for a furnace. The window device may include a frame placed on a sidewall of the furnace; a window placed on the frame; an air inlet placed on the frame; and a plurality of air outlets. The plurality of air outlets may be connected to the air inlet and an interior of the furnace. Each of two of the plurality of air outlets may connect with an air venting pipeline. Tangential directions of two air venting pipelines connected with two air outlets among the plurality of air outlets may form an angle and the angle may be within an angle range.
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4.
公开(公告)号:US20240003626A1
公开(公告)日:2024-01-04
申请号:US18251426
申请日:2021-11-05
申请人: CORNING INCORPORATED
CPC分类号: F27B5/18 , F27D7/02 , F27D19/00 , B28B11/243 , F27B2005/161
摘要: A method firing green ware. The method for firing includes setting a kiln oxygen concentration set point for an atmosphere of a ware space of a kiln during an oxygen-consuming event in the ware space of the kiln. An oxygen flux control mode is initiated that includes measuring an oxygen concentration of the atmosphere of the ware space in the kiln, comparing the oxygen concentration to the kiln oxygen concentration set point to determine a difference between the oxygen concentration and the kiln oxygen concentration set point, and adjusting a flow of secondary gas into the ware space to set an oxygen flux in the atmosphere in the ware space of the kiln based on the difference between the oxygen concentration and the kiln oxygen concentration set point. A kiln for firing the ceramic green ware and a manufacturing system including the kiln for manufacturing ceramic ware are also disclosed.
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公开(公告)号:US20230366627A1
公开(公告)日:2023-11-16
申请号:US18132654
申请日:2023-04-10
发明人: MINSU KIM , DONG-WOOK SONG , HONGROK JANG
CPC分类号: F27D7/02 , F27D9/00 , F27D2007/023 , F27D2009/0075
摘要: A heat treatment device includes a chamber accommodating a work substrate including a first organic layer, a heater part which is disposed in the chamber and heats the work substrate, an air supply part including a first nozzle which supplies an external air to the chamber, a second nozzle which is disposed in the first nozzle and supplies a process gas to the chamber, and a cover part provided through which an opening overlapping the second nozzle is defined and which is disposed at an end of the first nozzle, which is adjacent to an outlet of the first nozzle, and an air exhaust part exhausting particles in the chamber to an outside of the chamber.
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公开(公告)号:US11791176B2
公开(公告)日:2023-10-17
申请号:US16665343
申请日:2019-10-28
IPC分类号: H01L21/67 , H01L21/673 , F27D7/02 , H01L21/324 , C30B33/02 , C30B35/00
CPC分类号: H01L21/67109 , C30B33/02 , C30B35/00 , F27D7/02 , H01L21/324 , H01L21/67248 , H01L21/67323
摘要: Apparatus and methods to process one or more wafers are described. The apparatus comprises a chamber defining an upper interior region and a lower interior region. A heater assembly is on the bottom of the chamber body in the lower interior region and defines a process region. A wafer cassette assembly is inside the heater assembly and a motor is configured to move the wafer cassette assembly from the lower process region inside the heater assembly to the upper interior region.
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公开(公告)号:US20230280097A1
公开(公告)日:2023-09-07
申请号:US18114978
申请日:2023-02-27
申请人: Zhiwei Chen
发明人: Zhiwei Chen
CPC分类号: F27D17/004 , F27B14/0806 , F27D7/02 , C03B3/023 , C03B5/167 , C03B5/237
摘要: The present invention provides a powder-material flying melting furnace having dual regenerative chambers, which can be widely used in the fields of glass production, iron-making, non-ferrous metal smelting and solid fuel gasification. In the powder-material flying melting furnace having dual regenerative chambers of the present invention, a blow gas inlet is provided in a common feed pipeline or a raw material feeding pipeline, a forced feeding equipment is arranged on the feed inlets, and the raw material feeding pipeline is configured to be a movable feeding pipeline, such that the melts can be effectively prevented from being condensed and bonded on the inner walls of the feeding inlets.
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公开(公告)号:US11585601B2
公开(公告)日:2023-02-21
申请号:US17261112
申请日:2019-08-05
发明人: Pawel Olszewski
摘要: A flameless combustion oven arranges gas and air jets to directly impinge on the product being heated to substantially promote transfer of heat to the product by impingement transfer rather than by conventional radiation and thermally induced convection. In one embodiment, a set of spaced air and gas nozzles are uniformly distributed on a wall of the oven opposite the product to provide substantially uniform impingement over a surface of the product.
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公开(公告)号:US11377700B2
公开(公告)日:2022-07-05
申请号:US16628171
申请日:2018-07-02
发明人: Philippe Blostein , Mike Grant
摘要: A method of operating an ironmaking or steelmaking plant with low CO2-emissions is provided. Hydrogen and oxygen are generated by water decomposition and at least part of the generated hydrogen is injected as a reducing gas into one or more ironmaking furnaces with off-gas decarbonation and reinjection into the furnaces of at least a significant part of the decarbonated off-gas and at least part of the generated oxygen is injected as an oxidizing gas in the one or more ironmaking.
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公开(公告)号:US20220131129A1
公开(公告)日:2022-04-28
申请号:US17310793
申请日:2019-02-26
申请人: Linde GmbH
发明人: Edward FENG , Rocky WEI
摘要: A method for producing a ternary cathode material for lithium batteries by roasting raw material in a roasting kiln, wherein an atmosphere is provided in the roasting kiln, wherein injection of a gas component of the atmosphere into the roasting kiln is controlled in closed loop control manner, based on at least one process influencing parameter being measured, as well as an apparatus for producing a ternary cathode material.
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