公开(公告)号：US20240160119A1

公开(公告)日：2024-05-16

申请号：US18139381

申请日：2023-04-26

Applicant: SEMES CO., LTD.

Inventor： Nam Ki HONG ,  Ick Kyun KIM ,  Jae Wook LEE ,  Seung Kyu PARK ,  Tae Won YUN ,  Si Hwan YANG

IPC: G03F7/20 ,  B05B1/16 ,  B05B1/30 ,  B05B15/55 ,  H01L21/67

CPC classification number: G03F7/70925 ,  B05B1/16 ,  B05B1/30 ,  B05B15/55 ,  G03F7/70808 ,  H01L21/67051

Abstract: A home port for a semiconductor manufacturing nozzle head includes a body having a discharge space configured to receive treatment liquid discharged from a plurality of nozzles, discharge flow passages connected to be in communication with the discharge space and penetrating through the body so as to face the plurality of nozzles, and a cleaning liquid distribution system, which is formed to penetrate through the body, and is connected to transfer a cleaning liquid to the discharge flow passages. The cleaning liquid distribution system includes supply flow passages connected to supply the cleaning liquid to the discharge flow passages, and a lead-in passage connected to and which joins the supply flow passages, and connected to receive the cleaning liquid injected from the outside.