公开(公告)号：US20230268203A1

公开(公告)日：2023-08-24

申请号：US18111537

申请日：2023-02-18

Applicant: SEMES CO., LTD.

Inventor： Jin Taek Oh ,  Jong Seok Seo ,  Seung Han Lee ,  Dongwoon Park

IPC: H01L21/67 ,  H05B3/28 ,  F27B17/00 ,  G03F7/20

CPC classification number: H01L21/67103 ,  H05B3/28 ,  F27B17/0025 ,  G03F7/70875

Abstract: Provided are a heating unit including an air layer for thermal insulation and a substrate treating apparatus including the heating unit. The substrate treating apparatus includes: a housing providing a space in which a substrate is treated; a heating unit disposed in the housing and heating the substrate; a cooling unit disposed in the housing and cooling the substrate; and a transfer unit for moving the substrate, wherein the heating unit includes: a body including a heater therein; a first air layer provided inside the body for thermal insulation and formed in a first direction as a longitudinal direction thereof; and a second air layer provided inside the body for thermal insulation and formed in a second direction as a longitudinal direction thereof.