公开(公告)号：US20220186379A1

公开(公告)日：2022-06-16

申请号：US17503741

申请日：2021-10-18

Applicant: SEMES CO., LTD.

Inventor： Jin Mo JAE ,  Seung Hoon OH ,  Young Seop CHOI ,  Mi So PARK ,  Jong Hyeon WOO

IPC: C23C18/16

Abstract: An apparatus for treating a substrate includes a vessel having a sealable process space formed therein in which the substrate is accommodated, a supply port that is provided inside a wall of the vessel and that supplies a process fluid into the process space, an exhaust port provided inside the wall of the vessel and spaced apart from the supply port, and a buffer member provided in the process space, the buffer member being provided in a position overlapping with the supply port and the exhaust port when viewed from above. The buffer member includes a sidewall portion that is located outward of the supply port and the exhaust port and that makes contact with the wall of the vessel and an upper wall portion having a through-hole formed therein to correspond to a center of the substrate, the through-hole forming a straight flow path in an up/down direction.

公开(公告)号：US20220205782A1

公开(公告)日：2022-06-30

申请号：US17560390

申请日：2021-12-23

Applicant: SEMES CO., LTD.

Inventor： Young Seop CHOI ,  Yong-Jun SEO ,  Sang Hyun SON ,  Sang Min LEE ,  Jong Hyeon WOO ,  Hwan Bin KIM

IPC: G01C9/02 ,  G01P15/18 ,  G01P15/08 ,  G01C19/00

Abstract: A substrate type sensor provided in an atmosphere accompanied by a temperature change to measure a horizontality of a support member that supports a substrate is disclosed. The substrate type sensor may include a base having a shape of the substrate, one or more sensors provided in the base and including 3 or more axis acceleration sensors or 6 or more axis measurement units (IMUs), a receiver configured to receive data collected by the one or more sensors and a power source configured to provide electric power to the one or more sensors and the receiver.