公开(公告)号：US20240213079A1

公开(公告)日：2024-06-27

申请号：US18515867

申请日：2023-11-21

Applicant: SEMES CO., LTD.

Inventor： Jumi Lee ,  Jaeoh Bang ,  Minyoung KIM

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/68757 ,  H01L21/67109 ,  H01L21/68742 ,  H01L21/6875

Abstract: Provided is a substrate heater including a support plate configured to be loaded with a substrate, an insulating layer arranged under the support plate, and a heating portion arranged under the insulating layer and configured to heat the support plate, wherein the insulating layer includes a plurality of layers, wherein at least two of the plurality of layers of the insulating layer have different thermal expansion coefficients from each other.