公开(公告)号：US20240063042A1

公开(公告)日：2024-02-22

申请号：US18363962

申请日：2023-08-02

Applicant: SEMES CO., LTD.

Inventor： Kiwon HAN ,  Kyobong KIM ,  Sang-oh KIM

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67766 ,  H01L21/67259

Abstract: A transfer part may move the first substrate and the second substrate such that the first substrate and the second substrate are overlapped with each other when the transport transfers the first substrate and the second substrate. The detection part may detect a first position of the first substrate and a first position of the second substrate at points apart from a reference point where the first substrate and the second substrate are overlapped by first distances, and may detect respective second positions at points apart from the reference point by second distances. A control part may control movements of the first and the second substrates by the transfer part based on output of the detection part.