公开(公告)号：US20240210057A1

公开(公告)日：2024-06-27

申请号：US18522675

申请日：2023-11-29

Applicant: SEMES CO., LTD.

Inventor： Yunhwa HONG ,  Haneul YOO ,  Kiwon HAN ,  Junho SEO

IPC: F24F9/00 ,  F24F3/14 ,  H01L21/67 ,  H01L21/677

CPC classification number: F24F9/00 ,  F24F3/14 ,  H01L21/67253 ,  H01L21/67706 ,  H01L21/67742 ,  F24F2009/005

Abstract: A humidity control device in a process space allows each process space to satisfy a unique humidity condition and includes an injection module arranged in a second process space maintained at second humidity lower than first humidity within a first process space in which processing for a wafer is performed and configured to inject a gas for forming an air curtain onto a first door through which the wafer enters and exits and which is connected to the second process space, a signal generation module configured to generate an injection signal for the injection module to inject the gas, and an injection control module configured to, when the injection signal is generated, control the injection module to form the air curtain lowering an amount of humidity flowing into the second process space through a space opened by the first door by injecting the gas.

公开(公告)号：US20230360951A1

公开(公告)日：2023-11-09

申请号：US18352467

申请日：2023-07-14

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Kiwon HAN ,  Jin Sung SUN

IPC: H01L21/683 ,  B25J15/06 ,  B25J11/00 ,  B25J15/00 ,  H01L21/687

CPC classification number: H01L21/6838 ,  B25J15/0683 ,  B25J11/0095 ,  B25J15/0014 ,  H01L21/68707

Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.

公开(公告)号：US20210111062A1

公开(公告)日：2021-04-15

申请号：US17065641

申请日：2020-10-08

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Kiwon HAN ,  Jin Sung SUN

IPC: H01L21/683 ,  B25J15/06 ,  H01L21/687 ,  B25J15/00 ,  B25J11/00

Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.

公开(公告)号：US20210028030A1

公开(公告)日：2021-01-28

申请号：US16935602

申请日：2020-07-22

Applicant: SEMES CO., LTD.

Inventor： Tae Kyung KONG ,  Jin Sung SUN ,  Kiwon HAN

IPC: H01L21/67 ,  B65G47/90 ,  H01L21/687 ,  G03F7/16

Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.

公开(公告)号：US20240063042A1

公开(公告)日：2024-02-22

申请号：US18363962

申请日：2023-08-02

Applicant: SEMES CO., LTD.

Inventor： Kiwon HAN ,  Kyobong KIM ,  Sang-oh KIM

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67766 ,  H01L21/67259

Abstract: A transfer part may move the first substrate and the second substrate such that the first substrate and the second substrate are overlapped with each other when the transport transfers the first substrate and the second substrate. The detection part may detect a first position of the first substrate and a first position of the second substrate at points apart from a reference point where the first substrate and the second substrate are overlapped by first distances, and may detect respective second positions at points apart from the reference point by second distances. A control part may control movements of the first and the second substrates by the transfer part based on output of the detection part.