公开(公告)号：US20230352325A1

公开(公告)日：2023-11-02

申请号：US18302303

申请日：2023-04-18

Applicant: SEMES CO., LTD.

Inventor： Kwang Jun CHOI ,  Jun Woo LEE ,  Boyeon HWANG ,  Gyeong Seok HWANG ,  Nayoon JEOUNG ,  Sungkeun BYUN

IPC: H01L21/67 ,  H01L21/02

CPC classification number: H01L21/6715 ,  H01L21/67051 ,  H01L21/02052 ,  H01L21/67259

Abstract: An apparatus and method for dispensing treatment liquid, which enable treatment liquid to be accurately dispensed to an intended position on a substrate having a non-planar surface on the basis of measurement information obtained by three-dimensionally measuring the substrate. The apparatus may include: a substrate support unit on which a substrate is seated; a three-dimensional (3D) measurement device configured to three-dimensionally measure the substrate seated on the substrate support unit; a head unit configured to dispense treatment liquid onto the substrate seated on the substrate support unit; and a controller configured to receive actually measured 3D substrate information of the substrate from the 3D measurement device, generate printing pattern image information based on the actually measured 3D substrate information, and apply printing command information to the head unit according to the generated printing pattern image information.