公开(公告)号：US20240222174A1

公开(公告)日：2024-07-04

申请号：US18395570

申请日：2023-12-24

Applicant: SEMES CO., LTD.

Inventor： Seul Gi CHOI ,  Jun Hyun LIM ,  Young Jin JANG ,  Eun Jung LEE ,  Hee Jun YOUN ,  Gui Su PARK

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67712 ,  H01L21/67057 ,  H01L21/67706

Abstract: Proposed is a substrate transferring apparatus, and a liquid processing apparatus and substrate processing equipment including the same, which prevent a pattern leaning phenomenon during a substrate processing process. The substrate transferring apparatus that transfers substrates between cleaning tanks in the batch-type liquid processing apparatus includes a rail extended on a ceiling of a first cleaning tank in which a first processing liquid is stored and a second cleaning tank in which a second processing liquid is stored, a crane moving along the rail, and a vessel configured to be moved vertically by the crane. The vessel may include a first sub vessel and a second sub vessel that combine with each other to form a space for accommodating a substrate immersed in the first processing liquid.