ROBOT FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE

    公开(公告)号:US20240217114A1

    公开(公告)日:2024-07-04

    申请号:US18343774

    申请日:2023-06-29

    CPC classification number: B25J11/0095 B25J11/0085 B25J15/0028 B25J15/009

    Abstract: The inventive concept provides a substrate transfer robot. The substrate transfer robot includes a fastening body; a support body protruding to a front from the fastening body, and supporting a bottom surface of the substrate if the substrate is positioned in a first posture; a gripper member coupled to the fastening body and relatively movable with respect to the support body; and a gripper driver moving the gripper member between a first position and a second position, and wherein the gripper member includes: a first gripper positioned at a side of the support body; and a second gripper positioned at another side of the support body, and wherein an alignment pin for aligning a position of the substrate is installed at the support body, and if a position at which the substrate is aligned with the support body is referred to as a reference position, the first position is a position at which the first gripper and the second gripper contact a substrate positioned at the reference position to grip the substrate, and the second position is a position at which the first gripper and the second gripper are spaced apart from the substrate positioned at the reference position, and the first posture is a posture that a top surface of the substrate is horizontal to the ground.

Patent Agency Ranking