公开(公告)号：US20220310415A1

公开(公告)日：2022-09-29

申请号：US17665233

申请日：2022-02-04

Applicant: SEMES CO., LTD.

Inventor： Oh Yeol KWON ,  Soo Young PARK ,  Soo Yeon SHIN

IPC: H01L21/67 ,  B08B13/00 ,  B08B3/02 ,  G05D3/20 ,  G06T7/00 ,  G06T7/70

Abstract: A substrate treating method includes moving a first component of a substrate treatment device to a preset position in response to a treating process of the substrate treatment device, detecting, by a plurality of position detection sensors, a position of the first component, vision-testing, by a vision sensor, a positional state of the first component, and determining an operational state of an error in the detection of the plurality of position detection sensors or a malfunction of the substrate treatment device based on a detection result obtained by the plurality of position detection sensor and a test result obtained by the vision sensor.

公开(公告)号：US20220093430A1

公开(公告)日：2022-03-24

申请号：US17474469

申请日：2021-09-14

Applicant: SEMES CO., LTD.

Inventor： Ohyeol KWON ,  Soo Yeon SHIN ,  Hyun Hoo KIM ,  Myung Chan CHO

IPC: H01L21/67 ,  G06T7/00 ,  G06N3/04

Abstract: The inventive concept provides a method to determine whether a substrate treatment process is normal using a deep learning model. The method comprising receiving input on a substrate treatment process video, preprocessing the inputted video, using the deep learning model to study a preprocessed video, and determining whether the substrate treatment process is normal by comparing the trained model and a real time substrate treatment process video.