公开(公告)号：US20230215750A1

公开(公告)日：2023-07-06

申请号：US17970041

申请日：2022-10-20

Applicant: SEMES CO., LTD.

Inventor： Sunggun CHAE

IPC: H01L21/677 ,  G05B19/402 ,  G01B5/14 ,  G05D3/20

CPC classification number: H01L21/67736 ,  H01L21/67733 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67706 ,  G05B19/402 ,  G01B5/14 ,  G05D3/20 ,  G05B2219/49113

Abstract: Provided are an alignment jig, a side track buffer system including the same, and an alignment method using the same. The alignment jig includes a horizontal jig fixed to a bottom plate of a side track buffer to extend in a horizontal direction to a lower portion of the transfer rail, and a vertical jig fixed to the transfer rail to extend downward in a vertical direction so as to be adjacent to a top surface in the horizontal direction. A separation distance between an intersection point of the vertical jig and the horizontal jig and a central portion of the bottom plate is detected as a buffer separation distance, and a buffer frame is horizontally moved automatically or manually to allow the buffer separation distance to match a reference separation distance, so that the side track buffer is installed in an accurate position.