LIQUID SUPPLY UNIT, SUBSTRATE TREATING APPARATUS, AND BOTTLE REPLACING METHOD

    公开(公告)号:US20230131562A1

    公开(公告)日:2023-04-27

    申请号:US17969171

    申请日:2022-10-19

    Abstract: Provided is an apparatus for treating a substrate, the apparatus including: a liquid treating chamber for liquid-treating a substrate by supplying a treatment liquid to the substrate; and a liquid supply unit for supplying the treatment liquid to the liquid treating chamber, in which the liquid supply unit includes: a cabinet configured to be mounted with a bottle containing the treatment liquid; and a rotation generating part configured to rotate the bottle so that a direction in which an inlet of the bottle mounted on the cabinet faces is changed.

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