Silicon carbide field-effect transistors

    公开(公告)号:US11139394B2

    公开(公告)日:2021-10-05

    申请号:US16667664

    申请日:2019-10-29

    Abstract: In a general aspect, a silicon carbide (SiC) field-effect transistor (FET) can include a substrate of a first conductivity type, a drift region of the first conductivity type disposed on the substrate, a spreading layer of the first conductivity type disposed in the drift region, a body region of a second conductivity type disposed in the spreading layer, and a source region of the first conductivity type disposed in the body region. The SiC FET can further include a spacer layer of the first conductivity type disposed on the source region the body region and the spreading layer, and a lateral channel region of the first conductivity type disposed in the spacer layer. The SiC FET can also include a gate structure that includes an aluminum nitride layer disposed on the lateral channel region, and an aluminum gallium nitride layer of the second conductivity disposed on the AlN layer.

    Silicon carbide field-effect transistors

    公开(公告)号:US11894454B2

    公开(公告)日:2024-02-06

    申请号:US17448916

    申请日:2021-09-27

    Abstract: In a general aspect, a silicon carbide (SiC) metal-oxide-semiconductor field-effect transistor (MOSFET) can include a substrate of a first conductivity type, a drift region of the first conductivity type disposed on the substrate, a spreading layer of the first conductivity type disposed in the drift region, a body region of a second conductivity type disposed in the spreading layer, and a source region of the first conductivity type disposed in the body region. The SiC MOSFET can also include a gate structure that includes a gate oxide layer, an aluminum nitride layer disposed on the gate oxide layer, and a gallium nitride layer of the second conductivity disposed on the aluminum nitride layer.

    Low turn-on voltage silicon carbide rectifiers

    公开(公告)号:US10707340B2

    公开(公告)日:2020-07-07

    申请号:US16124413

    申请日:2018-09-07

    Abstract: In a general aspect, a silicon carbide (SiC) rectifier can include a substrate of a first conductivity type, a drift region of the first conductivity type, a junction field effect transistor (JFET) region of the first conductivity type, a body region of a second conductivity type, an anode implant region of the first conductivity type, and a channel of the first conductivity type. The channel can be in contact with and disposed between the JFET region and the anode implant region. A portion of the channel between the anode implant region and the JFET region can be disposed in the body region, The channel can be configured to be off under zero-bias conditions, and on at a positive turn-on voltage.

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