公开(公告)号：US11933809B2

公开(公告)日：2024-03-19

申请号：US17658139

申请日：2022-04-06

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Wei Lee ,  Chia-Hao Lin ,  Shih-Hsiung Tseng ,  Kuan-Ju Tseng ,  Chao-Shiun Wang

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/08 ,  G01P15/125 ,  G01P15/18

Abstract: The present application discloses an inertial sensor comprising a proof mass, an anchor, a flexible member and several sensing electrodes. The anchor is positioned on one side of the sensing, mass block in a first axis. The flexible member is connected to the anchor point and extends along the first axis towards the proof mass to connect the proof mass, in which the several sensing electrodes are provided. In this way, the present application can effectively solve the problems of high difficulty in the production and assembly of inertial sensors and poor product reliability thereof.

公开(公告)号：US11614327B2

公开(公告)日：2023-03-28

申请号：US17383893

申请日：2021-07-23

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Hsiung Tseng ,  Shih-Wei Lee ,  Chao-Shiun Wang

IPC: G01C19/5663 ,  G01C19/5769

Abstract: The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.