公开(公告)号：US11933809B2

公开(公告)日：2024-03-19

申请号：US17658139

申请日：2022-04-06

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Wei Lee ,  Chia-Hao Lin ,  Shih-Hsiung Tseng ,  Kuan-Ju Tseng ,  Chao-Shiun Wang

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/08 ,  G01P15/125 ,  G01P15/18

Abstract: The present application discloses an inertial sensor comprising a proof mass, an anchor, a flexible member and several sensing electrodes. The anchor is positioned on one side of the sensing, mass block in a first axis. The flexible member is connected to the anchor point and extends along the first axis towards the proof mass to connect the proof mass, in which the several sensing electrodes are provided. In this way, the present application can effectively solve the problems of high difficulty in the production and assembly of inertial sensors and poor product reliability thereof.

公开(公告)号：US20240017987A1

公开(公告)日：2024-01-18

申请号：US18129911

申请日：2023-04-03

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Wei Lee ,  Kuan-Ju Tseng ,  Chao-Shiun Wang

IPC: B81B3/00 ,  B81C3/00

CPC classification number: B81B3/0072 ,  B81C3/001 ,  B81B2203/0307 ,  B81C2203/054

Abstract: The present application discloses an anchor structure for application to a microelectromechanical system device comprising a cap layer, a device layer and a substrate layer. Such an anchor structure enhances the stress tolerance of the microelectromechanical system device. The anchor structure comprises a first anchor portion, a second anchor portion and a flexible member located in the device layer. The first anchor portion and the second anchor portion are connected to two sides of the flexible member, respectively. The first anchor is secured to the cap layer by a first bonding portion, and the second anchor is secured to the substrate layer by a second bonding portion.