公开(公告)号：US20210050836A1

公开(公告)日：2021-02-18

申请号：US16978950

申请日：2019-05-05

Applicant: SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Da CHEN ,  Hongfei WANG ,  Peng WANG ,  Xiaojun ZHANG ,  Zhongli LI

IPC: H03H3/02 ,  H01L41/08 ,  H01L41/27 ,  H01L41/314 ,  H01L41/332

Abstract: Disclosed is a method of manufacturing a piezoelectric thin film resonator on a non-silicon substrate, including the following steps: depositing a copper thin film on a silicon wafer; coating photoresist on the copper thin film to perform photoetching so as to remove photoresist in an air gap region under the piezoelectric thin film resonator to be disposed; electroplating-depositing a copper layer, and removing photoresist to obtain a stepped peel sacrifice layer; coating polyimide and performing imidization by heat treatment, making a sandwich structure of the piezoelectric thin film resonator above the polyimide layer; performing etching for the polyimide layer in a region not covered by the piezoelectric thin film resonator by oxygen plasma; placing the obtained device into a copper corrosion solution to dissolve the copper around and under the piezoelectric thin film resonator, attaching a drum coated with polyvinyl alcohol glue onto the piezoelectric thin film resonator, releasing and peeling it from the silicon wafer and then transferring it to a desired non-silicon substrate; washing the drum with hot water to separate the drum from the piezoelectric thin film resonator so as to complete the manufacturing process.

公开(公告)号：US20210209263A1

公开(公告)日：2021-07-08

申请号：US17057443

申请日：2020-01-17

Applicant: SHANDONG UNIVERSITY

Inventor： Shucai LI ,  Yiguo XUE ,  Chuanqi QU ,  Daohong QIU ,  Yufan TAO ,  Guangkun LI ,  Maoxin SU ,  Jiuhua CUI ,  Peng WANG

IPC: G06F30/13 ,  G06F30/20 ,  G06F16/21 ,  G06N3/00 ,  G06F111/06

Abstract: A tunnel tunneling feasibility prediction method and system based on a TBM rock-machine parameter dynamic interaction mechanism includes: creating device information and rock mass information sample databases; analyzing and calculating a rock mass information sample database of a rising section of TBM tunneling parameters to obtain rock mass information weights under a condition of different device states; determining convergence conditions in different device information states through the rock-machine parameter dynamic interaction mechanism, and obtaining an optimal solution of tunneling parameters of a stable section of the TBM tunneling parameters under a condition of different rock mass information; and creating an optimal tunneling formula applicable to TBM tunneling through the obtained weight information and the optimal solution of the tunneling parameters of the stable section, performing TBM tunneling feasibility classification, and predicting TBM tunneling efficiency. Indexes of device parameters and rock parameters are selected based on TMB construction features.

公开(公告)号：US20220026592A1

公开(公告)日：2022-01-27

申请号：US17296855

申请日：2020-11-04

Applicant: SHANDONG UNIVERSITY

Inventor： Shucai LI ,  Maoxin SU ,  Yiguo XUE ,  Peng WANG ,  Daohong QIU ,  Yimin LIU

IPC: G01V1/04 ,  G01V1/18

Abstract: A wave detector integrated device includes a support, protective shell and mode converter. The protective shell is installed on the support and rotates by the mode converter, and has a hollow cylindrical structure. A seismic source hammer is suspended at a protective shell central axis position. Electromagnetic accelerators are installed in a bus direction of the protective shell, and the seismic source hammer is connected with the electromagnetic accelerators. A drill bit type wireless transmission wave detector or standby flat bottom type wave detector is connected above the protective shell through a second telescopic rod having a driving device therein and driving the drill bit type wave detector to rotate. A power supply is installed inside the protective shell, and is connected with a current controller and circuit protection device. The current controller is respectively connected with the electromagnetic accelerators, drill bit type wave detector, driving device and mode converter.

公开(公告)号：US20220308251A1

公开(公告)日：2022-09-29

申请号：US17431051

申请日：2020-11-17

Applicant: SHANDONG UNIVERSITY

Inventor： Maoxin SU ,  Shucai LI ,  Yimin LIU ,  Yiguo XUE ,  Li GUAN ,  Peng WANG

IPC: G01V3/38 ,  G01N27/04

Abstract: A three-dimensional electrical resistivity tomography method and system belonging to the field of geological geophysical prospecting, the method including the steps of prospecting a region containing a geological anomaly with at least two prospecting modes respectively to acquire two-dimensional resistivity data of a corresponding detection plane; unifying coordinate systems of resistivity data points acquired in all prospecting modes, and extracting data points with the same coordinates; carrying out data fusion on extracted resistivity data at the same position by utilizing a principal component analysis method; and carrying out three-dimensional coordinate conversion on resistivity data acquired after fusion to form a three-dimensional model.

公开(公告)号：US20230003917A1

公开(公告)日：2023-01-05

申请号：US17779816

申请日：2021-06-16

Applicant: SHANDONG UNIVERSITY

Inventor： Shucai LI ,  Yiguo XUE ,  Maoxin SU ,  Chunjin LIN ,  Li GUAN ,  Daohong QIU ,  Zhiqiang LI ,  Yimin LIU ,  Peng WANG ,  Huimin GONG

IPC: G01V8/02

Abstract: A three-dimensional imaging method and system for surface comprehensive geophysical prospecting, the method includes: acquiring detection data of a plurality of two-dimensional profiles of a surface detection site; forming two-dimensional profile resistivity data by geophysical inversion of the detection data; performing three-dimensional coordinate conversion on the two-dimensional profile resistivity data to obtain resistivity data of a three-dimensional coordinate system; and converting the resistivity data of the three-dimensional coordinate system into a three-dimensional model by using a Kriging interpolation method.