公开(公告)号：US20170207065A1

公开(公告)日：2017-07-20

申请号：US15324553

申请日：2016-03-29

Applicant: SHINMAYWA INDUSTRIES, LTD.

Inventor： Kensuke UEMURA ,  G. Alexey REMNEV

IPC: H01J37/305 ,  H01J37/08

CPC classification number: H01J37/3053 ,  C23C14/022 ,  C23C16/0245 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/0825 ,  H01J2237/20214 ,  H01J2237/3114 ,  H01J2237/3132 ,  H01J2237/3151

Abstract: A de-coating method includes: exposing a coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CF4 that promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.