公开(公告)号：US10161990B2

公开(公告)日：2018-12-25

申请号：US15124439

申请日：2015-02-05

Applicant: SINTOKOGIO, LTD.

Inventor： Nobuyuki Takita ,  Takayuki Hamada ,  Yoichi Sakamoto ,  Syuji Ishikawa

IPC: G01R31/27 ,  G01R31/26 ,  G01R1/04 ,  G01R31/28

Abstract: In an inspection system for a device to be tested, a stage, on which a device to be tested and a diode are loaded, is moved to a static characteristic test station and a dynamic characteristic test station. A method for operating an inspection system for a device to be tested includes a process of carrying in and loading the stage, on which the device to be tested and the diode are loaded, a process of carrying in and fixing the device to be tested to a test station, a process of bringing a probe into contact with the diode, a process of switching a position of the diode, a process of performing a measurement with respect to the device to be tested, a process of carrying out the device to be tested from the stage, and a process of classifying the device to be tested.