公开(公告)号：US3478244A

公开(公告)日：1969-11-11

申请号：US3478244D

申请日：1966-12-13

Applicant: STEIGERWALD STRAHLTECH

Inventor： MEYER EDGAR ,  SCHEFFELS WILHELM

IPC: H01J37/067 ,  H01J1/02

CPC classification number: H01J37/067

公开(公告)号：US3601577A

公开(公告)日：1971-08-24

申请号：US3601577D

申请日：1970-01-20

Applicant: STEIGERWALD STRAHLTECH

Inventor： MEYER EDGAR ,  GEISSLER JOACHIM

IPC: H01J37/315 ,  B23K15/00 ,  H01J37/147 ,  H01J37/30 ,  H01J37/304

CPC classification number: B23K15/0013 ,  H01J37/147 ,  H01J37/3005 ,  H01J37/304

Abstract: In equipment using a beam of charged particles for machining a workpiece, the size and/or shape of the beam''s impact spot is checked by placing a sharply defined edge to intercept energy radiated from the impact spot so that the radiation casts a shadow on a detection device, which is provided by a fluorescent screen of a photoelectric detector or by a combination of them.