公开(公告)号：US11207747B2

公开(公告)日：2021-12-28

申请号：US16307717

申请日：2017-06-06

申请人： AQUASIUM TECHNOLOGY LIMITED

发明人： Paul Plumb ,  Conrad Dumont

IPC分类号： B23K15/06 ,  B23K26/12 ,  B23K26/14 ,  H01J37/18 ,  H01J37/244 ,  B23K26/21 ,  B23K26/282 ,  B23K15/00 ,  H01J37/315 ,  B23K26/70

摘要： A welding head for a welding apparatus, the head comprising an outer face attachable to a welding device such as an electron beam gun or laser, an inner face sealable to a workpiece, and an outer sealing ring and an inner sealing ring situated within the inner face and disposed on either side of an evacuatable region, wherein the inner face has a teardrop-shaped profile. Outer and inner sealing rings can be inflatable or formed from different materials, the outer sealing ring being formed from a material with a Shore hardness of between 50 to 70 and the inner sealing ring being formed from a material with a Shore hardness of 20 to 40. A bridging seal can extend from within the inner sealing ring to the outer sealing ring.

公开(公告)号：US09142384B2

公开(公告)日：2015-09-22

申请号：US14302024

申请日：2014-06-11

申请人： FEI Company

发明人： Rudolf Johannes Peter Gerardus Schampers ,  Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen

IPC分类号： H01J37/20 ,  H01J37/26 ,  G01N1/28 ,  G01N1/42 ,  G02B21/32 ,  H01J37/315

CPC分类号： H01J37/20 ,  G01N1/28 ,  G01N1/42 ,  G02B21/32 ,  H01J37/26 ,  H01J37/315 ,  H01J2237/002 ,  H01J2237/2065 ,  H01J2237/31744 ,  H01J2237/31745

摘要： The invention relates to a method of welding a vitreous biological sample at a temperature below the glass transition temperature of approximately −137° C. to a micromanipulator, also kept at a temperature below the glass transition temperature. Where prior art methods used IBID with, for example, propane, or a heated needle (heated resistively or by e/g/laser), the invention uses a vibrating needle to locally melt the sample. By stopping the vibration, the sample freezes to the micromanipulator. The heat capacity of the heated parts is small, and the amount of material that stays in a vitreous condition thus large.

摘要翻译： 本发明涉及一种将玻璃态生物样品在低于大约-137℃的玻璃化转变温度的温度下焊接到也保持在低于玻璃化转变温度的温度下的显微操纵器的方法。 当现有技术方法使用IBID与例如丙烷或加热针（电阻加热或e / g /激光）时，本发明使用振动针来局部熔化样品。 通过停止振动，样品冻结到显微操纵器。 加热部件的热容量小，因此玻璃状态的材料的量变大。

公开(公告)号：US06933507B2

公开(公告)日：2005-08-23

申请号：US10619702

申请日：2003-07-15

申请人： Kenneth H. Purser ,  Harald A. Enge ,  Norman L. Turner

发明人： Kenneth H. Purser ,  Harald A. Enge ,  Norman L. Turner

IPC分类号： H01J37/141 ,  H01J37/08 ,  H01J37/14 ,  H01J37/147 ,  H01J37/315 ,  H01J37/317 ,  H01L21/425

CPC分类号： H01J37/141 ,  H01J37/14 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/315 ,  H01J37/3171 ,  H01J2237/141 ,  H01J2237/1534 ,  H01J2237/31703

摘要： A method and apparatus satisfying growing demands for improving the precision of angle of incidence of implanting ions that impact a semiconductor wafer and the precision of ribbon ion beams for uniform doping of wafers as they pass under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes. The design of the optical elements makes possible: (1) Broad-range adjustment of the width of a ribbon beam at the work piece; (2) Correction of inaccuracies in the intensity distribution across the width of a ribbon beam; (3) Independent steering about both X and Y axes; (4) Angle of incidence correction at the work piece; and (5) Approximate compensation for the beam expansion effects arising from space charge. In a practical situation, combinations of the elements allow ribbon beam expansion between source and work piece to 350 millimeter, with good uniformity and angular accuracy. Also, the method and apparatus may be used for introducing quadrupole fields along a beam line.

摘要翻译： 一种满足日益增长的要求的方法和装置，用于提高冲击半导体晶片的注入离子入射角的精度以及当离子束通过时晶片的均匀掺杂的带状离子束的精度。 该方法和装置涉及用于植入目的的新型磁离子 - 光学传输元件的设计和组合。 光学元件的设计成为可能：（1）宽幅调节工件上的带状光束的宽度; （2）纠正带状横梁宽度的强度分布不准确; （3）关于X轴和Y轴的独立转向; （4）工件入射角校正; 和（5）空间费用引起的光束膨胀效应的近似补偿。 在实际情况下，这些元件的组合允许源和工件之间的带状光束膨胀到350毫米，具有良好的均匀性和角度精度。 此外，该方法和装置可用于沿着光束线引入四极场。

公开(公告)号：US4317022A

公开(公告)日：1982-02-23

申请号：US208428

申请日：1980-11-19

申请人： Hisanao Kita ,  Yoshinori Karatsu ,  Takamitsu Nakazaki ,  Yoji Akutsu

发明人： Hisanao Kita ,  Yoshinori Karatsu ,  Takamitsu Nakazaki ,  Yoji Akutsu

IPC分类号： B23K15/00 ,  H01J37/15 ,  H01J37/315 ,  B23K27/00

CPC分类号： H01J37/315 ,  B23K15/0013 ,  H01J37/15

摘要： An electron beam welding machine comprises an electron gun including a first beam adjusting means, a second beam adjusting means disposed spaced from the first beam adjusting means so as to be movable in the direction of an electron beam path, and position adjusting means for adjusting the position of the second beam adjusting means through rotary movement about an axis perpendicularly crossing the electron beam path and linear movements on a plane perpendicular to the electron beam path. The machine further includes a mirror and light source mounted on the electron gun to emit light on the electron beam path, and photodetectors mounted on the opposite sides of the second beam adjusting means so as to face the electron gun and a workpiece, whereby the correct position of the second beam adjusting means is detected.

摘要翻译： 电子束焊接机包括电子枪，该电子枪包括第一光束调节装置，与第一光束调节装置间隔开以便能够沿电子束路径移动的第二光束调节装置，以及位置调节装置， 第二光束调节装置通过围绕垂直于电子束路径的轴线的旋转运动和垂直于电子束路径的平面上的线性运动而进行第二光束调节装置的位置。 该机器还包括安装在电子枪上的反射镜和光源，以在电子束路径上发光，以及安装在第二光束调节装置的相对侧上以便面对电子枪和工件的光电检测器，由此正确 检测第二光束调整装置的位置。

公开(公告)号：US3999032A

公开(公告)日：1976-12-21

申请号：US640448

申请日：1975-12-15

申请人： Rolf Mayer

发明人： Rolf Mayer

IPC分类号： H01J37/315 ,  B23K15/02 ,  G05F1/46 ,  H01J37/24 ,  B23K15/00

CPC分类号： H01J37/243 ,  B23K15/02 ,  G05F1/462

摘要： A beam generating tube in a welder has an anode connected to ground potential and a cathode-Wehnelt electrode circuit connected across a portion of a voltage divider which is connected to a high voltage source. The voltage drop across the portion of the voltage divider is varied by means of a control tube connected in parallel with that portion, the voltage at the control electrode of the control tube being varied as a function of the difference between the actual beam current and the desired beam current as set externally. A diode is connected from the cathode of the beam generating tube to the voltage divider tap so that the voltage drop across the control tube is limited when the welder is not in operation and no current flows from the voltage divider tap to the control tube when the welder is in operation. When the difference between the actual beam current and the desired beam current exceeds a predetermined difference, the energization of the beam generating tube is interrupted.

摘要翻译： 焊机中的光束产生管具有连接到接地电位的阳极和连接到连接到高电压源的分压器的一部分上的阴极 - Wehnelt电极电路。 通过与该部分并联连接的控制管来改变分压器部分上的电压降，控制管的控制电极处的电压作为实际光束电流和 期望的束电流设置在外部。 二极管从光束产生管的阴极连接到分压器抽头，使得当焊机不工作时，控制管上的电压降受到限制，并且当焊机不工作时没有电流从分压器抽头流到控制管 焊机正在运行。 当实际光束电流与期望光束电流之间的差超过预定差值时，光束产生管的通电被中断。

公开(公告)号：US3835291A

公开(公告)日：1974-09-10

申请号：US33291573

申请日：1973-02-16

申请人： WELDING RESEARCH INC

发明人： SCIAKY D

IPC分类号： H01J37/18 ,  B23K15/06 ,  F16J15/32 ,  F16J15/54 ,  H01J37/315 ,  B23K15/00

CPC分类号： B23K15/06 ,  F16J15/3272 ,  F16J15/54 ,  Y10S277/906 ,  Y10S277/913

摘要： A sealing device for sealing cylindrical objects passing through a wall of a vacuum chamber and which are to be rotated about their longitudinal axes comprising a two part annular resilient seal separable along a plane passing through a diameter of the seal. The parts are installed one on each section of a wall of the chamber which has been split into two parts which may be moved in relation to one another so that when the wall sections are separated the seal parts are separated and the inside of the vacuum chamber is accessible so that the cylindrical objects may be positioned part inside the chamber and the remainder extending outside the chamber. When the wall sections are brought to the closed position the seal parts meet along the plane and surround the cylinder so as to form an effective vacuum seal between wall and cylinder. Means are provided in the resilient seal for preventing leakage of air into the chamber along the interface between the two seal parts when the cylindrical objects are in rotation.

摘要翻译： 用于密封圆柱形物体的密封装置，其通过真空室的壁并围绕其纵向轴线旋转，其包括沿着通过密封件的直径的平面可分离的两部分环形弹性密封件。 这些部件被安装在腔室壁的每个部分上，其已经被分成两部分，这两个部分可以相对于彼此移动，使得当壁部分分开时，密封部分被分离并且真空室的内部 可以使得圆柱形物体可以位于腔室内部并且其余部分延伸到腔室外部。 当壁部分处于关闭位置时，密封部分沿着平面相遇并围绕圆筒，以在壁和圆筒之间形成有效的真空密封。 装置设置在弹性密封件中，用于当圆柱形物体旋转时，防止空气沿着两个密封部件之间的界面泄漏到腔室中。

公开(公告)号：US3601575A

公开(公告)日：1971-08-24

申请号：US3601575D

申请日：1969-01-24

申请人： STEIGERWALD GMBH K H

发明人： MEYER EDGAR ,  GEISSLER JOACHIM

IPC分类号： H01J37/315 ,  B23K15/00 ,  H01J37/147 ,  H01J37/30 ,  H01J37/304

CPC分类号： B23K15/0013 ,  H01J37/147 ,  H01J37/3005 ,  H01J37/304

摘要： A viewing system for monitoring the focus of a beam of charged particles at the impact spot in apparatus using such beam for the machining of a workpiece is described. The viewing system utilizes the charged-particle radiation moving reversely with respect to the beam from the impact spot and focuses this in an image plane. A fluorescent screen is provided in the image plane and behind the screen is a photoelectric detector having a photosensitive area smaller than the image of the particles on the screen whereby the intensity of the radiation incident upon the photoelectric device can be used an an indication of the focus of the beam on the impact spot. Various devices are illustrated and described.

公开(公告)号：US3520055A

公开(公告)日：1970-07-14

申请号：US3520055D

申请日：1967-04-26

申请人： WESTERN ELECTRIC CO

发明人： JANNETT FREDERICK JOSEPH

IPC分类号： G02B21/26 ,  H01J37/315 ,  H01L21/00 ,  H01R43/00 ,  H05K3/30

CPC分类号： H01L21/67132 ,  B23K26/009 ,  B23K26/10 ,  B23K26/244 ,  G02B21/26 ,  H01J37/315 ,  Y10S65/04 ,  Y10T29/41 ,  Y10T29/43 ,  Y10T29/49101 ,  Y10T29/49126 ,  Y10T29/4981 ,  Y10T29/53096 ,  Y10T29/53265

公开(公告)号：US10319563B2

公开(公告)日：2019-06-11

申请号：US16220340

申请日：2018-12-14

申请人： Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

发明人： Peng Liu ,  Wei Zhao ,  Xiao-Yang Lin ,  Duan-Liang Zhou ,  Chun-Hai Zhang ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC分类号： H01J37/00 ,  H01J37/30 ,  C01B32/182 ,  C01G39/06 ,  H01J37/302 ,  H01J37/31 ,  H01J37/315 ,  H01J37/317 ,  B82Y20/00 ,  H01J37/305 ,  B82Y35/00

摘要： The disclosure relates to an electronic beam machining system. The system includes a vacuum chamber; an electron gun located in the vacuum chamber and used to emit electron beam; a holder located in the vacuum chamber and used to fix an object; a control computer; and a diffraction unit located in the vacuum chamber; the diffraction unit includes a two-dimensional nanomaterial; the electron beam transmits the two-dimensional nanomaterial to form a transmission electron beam and a plurality of diffraction electron beams; the transmission electron beam and the plurality of diffraction electron beams radiate the object to form a transmission spot and a plurality of diffraction spots.

公开(公告)号：US10236157B2

公开(公告)日：2019-03-19

申请号：US15615324

申请日：2017-06-06

申请人： Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

发明人： Peng Liu ,  Wei Zhao ,  Xiao-Yang Lin ,  Duan-Liang Zhou ,  Chun-Hai Zhang ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC分类号： H01J37/00 ,  H01J37/30 ,  C01B32/182 ,  C01G39/06 ,  H01J37/302 ,  B82Y20/00 ,  H01J37/305 ,  H01J37/31 ,  H01J37/315 ,  H01J37/317 ,  B82Y35/00

摘要： The disclosure relates to an electronic beam machining system. The system includes a vacuum chamber; an electron gun located in the vacuum chamber and used to emit electron beam; a holder located in the vacuum chamber and used to fix an object; a control computer; and a diffraction unit located in the vacuum chamber; the diffraction unit includes a two-dimensional nanomaterial; the electron beam transmits the two-dimensional nanomaterial to form a transmission electron beam and a plurality of diffraction electron beams; the transmission electron beam and the plurality of diffraction electron beams radiate the object to form a transmission spot and a plurality of diffraction spots.