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公开(公告)号：US20240027922A1
公开(公告)日：2024-01-25
申请号：US18224063
申请日：2023-07-20
申请人： STEK CO., LTD.
发明人： Ming-Sheng Chen
CPC分类号： G03F7/70825 , G03F7/70716 , G03F7/7085 , G03F1/84
摘要： A mask inspection machine includes a platform unit for carrying a transparent container. The transparent container includes a lower window and an upper window. The platform unit includes a platform and a carrier. The platform includes a slot. The carrier is movable on the platform along the slot. The carrier includes a plate and guiding elements. The plate includes a support face including an inspection window corresponding to the lower window of the transparent container. The guiding elements are connected to the support face for guiding the transparent container onto the support face.
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公开(公告)号：US20190329301A1
公开(公告)日：2019-10-31
申请号：US15967577
申请日：2018-04-30
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
摘要： A substrate-cleaning apparatus includes a transmission unit, a wet cleaning unit and a dry cleaning unit. The transmission unit includes a movable clamp for clamping a substrate that includes a face without covering the face of the substrate. The wet cleaning unit includes a wiper and a liquid pump. The wiper includes a strip of cleaning cloth and an abutting element for pressing the cleaning cloth against the face of the substrate. The liquid pump sends cleaning liquid to the abutting element that in turn sends the cleaning liquid to the cleaning cloth when the abutting element presses the cleaning cloth against the face of the substrate. The dry cleaning unit includes a wiper comprising a strip of cleaning cloth for wiping dry the face of the substrate without leaving any water mark on the face.
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公开(公告)号：US20180238812A1
公开(公告)日：2018-08-23
申请号：US15697204
申请日：2017-09-06
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
IPC分类号： G01N21/88 , G01N21/90 , G01N21/956 , G01N21/89 , G06T7/00
CPC分类号： G01N21/8851 , G01N21/8916 , G01N21/9009 , G01N21/956 , G06T7/001
摘要： An optical screening device includes a box and a light source. The box includes two chambers. The first chamber includes an incident passageway made with an exit. The second chamber includes a reflection passageway made with an entrance and an exit. The light source is inserted in the first chamber and adapted for casting incident light onto a first face of an inspected object located out of the box through the exit of the incident passageway so that primary reflected light goes into the second chamber from the first face of the inspected object via the entrance of the reflection passageway and goes out of the second chamber through the exit of the reflection passageway. The entrance of the reflection passageway is made with small width to allow only the primary reflected light to enter the second chamber.
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公开(公告)号：US20240027895A1
公开(公告)日：2024-01-25
申请号：US18224062
申请日：2023-07-20
申请人： STEK CO., LTD.
发明人： Ming-Sheng Chen
CPC分类号： G03F1/84 , G03F7/70653 , G03F7/70725 , G03F7/70825 , G03F7/7085 , G03F7/70833
摘要： A mask inspection apparatus includes a booth, a carrier, two linear scanners, a light source module and a control unit. The booth includes a platform including a slot. The carrier is movable along the slot. The carrier includes a support face for supporting the mask, guiding elements on the support face, and an inspection window in the support face. The support face extends above the platform. The linear image scanners are vertically movable respectively blow and above the platform. The light source module includes two light boxes on the platform. The light boxes are operable to cast light on an upper face of the mask in an upper position. The light boxes are operable to cast light on a lower face of the mask in a lower position. The control unit is electrically connected to the carrier, the linear image scanner and the light source module.
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公开(公告)号：US11123775B2
公开(公告)日：2021-09-21
申请号：US15967577
申请日：2018-04-30
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
摘要： A substrate-cleaning apparatus includes a transmission unit, a wet cleaning unit and a dry cleaning unit. The transmission unit includes a movable clamp for clamping a substrate that includes a face without covering the face of the substrate. The wet cleaning unit includes a wiper and a liquid pump. The wiper includes a strip of cleaning cloth and an abutting element for pressing the cleaning cloth against the face of the substrate. The liquid pump sends cleaning liquid to the abutting element that in turn sends the cleaning liquid to the cleaning cloth when the abutting element presses the cleaning cloth against the face of the substrate. The dry cleaning unit includes a wiper comprising a strip of cleaning cloth for wiping dry the face of the substrate without leaving any water mark on the face.
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公开(公告)号：US10241057B2
公开(公告)日：2019-03-26
申请号：US15697204
申请日：2017-09-06
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
摘要： An optical screening device includes a box and a light source. The box includes two chambers. The first chamber includes an incident passageway made with an exit. The second chamber includes a reflection passageway made with an entrance and an exit. The light source is inserted in the first chamber and adapted for casting incident light onto a first face of an inspected object located out of the box through the exit of the incident passageway so that primary reflected light goes into the second chamber from the first face of the inspected object via the entrance of the reflection passageway and goes out of the second chamber through the exit of the reflection passageway. The entrance of the reflection passageway is made with small width to allow only the primary reflected light to enter the second chamber.
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公开(公告)号：US20190331475A1
公开(公告)日：2019-10-31
申请号：US15967565
申请日：2018-04-30
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
摘要： A boundary detector detects a boundary between a transparent plate and a frame. The boundary detector includes a light source, a shield and two beam-adjusting units. The light source emits an original beam. The shield blocks secondary reflected beam and slits the original beam into a middle incident beam and two lateral incident beams. The middle incident beam gets reflected from the transparent plate and becomes a middle reflected beam. The lateral incident beams get reflected from two lateral portions of the frame and become two lateral reflected beam. The beam-adjusting units direct the lateral incident beams. The intensity of the middle reflected beam is different from that of the lateral reflected beams so that the boundary is detected.
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公开(公告)号：US10345248B2
公开(公告)日：2019-07-09
申请号：US15697083
申请日：2017-09-06
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
IPC分类号： G01N21/94 , G01N21/89 , G01N21/896 , G01N21/88
摘要： An optical system for inspecting a transparent plate includes a light source for casting incident light onto a face of the transparent plate so that there is a primary reflected light and secondary reflected light from the face of the transparent plate, a photo sensor for receiving light from the face of the transparent plate, and a blocking element for blocking the secondary reflected light while allowing the primary reflected light to reach the photo sensor.
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公开(公告)号：US20190333797A1
公开(公告)日：2019-10-31
申请号：US15967594
申请日：2018-04-30
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
IPC分类号： H01L21/673 , G03F1/66
摘要： A case-opening apparatus is operable to open a snap-shot case. The includes a first shell, a second shell pivotally connected to the first shell, a tab formed on one of the first and second shells, and an elastic hook formed on the other one of the first and second shells and engageable with the tab. The case-opening apparatus includes a holding unit, a lifting unit and a key-operating unit. The holding unit includes a holder for holding the first shell. The lifting unit is located above the holding unit and includes a pivotable frame and a grasper connected to the pivotable frame and operable to grasp the second shell. The key-operating unit is located in the vicinity of the holding unit and includes a key operable to pivot the elastic hook relative to the tab.
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公开(公告)号：US20180238813A1
公开(公告)日：2018-08-23
申请号：US15697083
申请日：2017-09-06
申请人： STEK CO., LTD
发明人： Ming-Sheng Chen
IPC分类号： G01N21/94 , G01N21/89 , G01N21/896 , G01N21/88
CPC分类号： G01N21/94 , G01N21/8806 , G01N21/8901 , G01N21/896 , G01N21/958
摘要： An optical system for inspecting a transparent plate includes a light source for casting incident light onto a face of the transparent plate so that there is a primary reflected light and secondary reflected light from the face of the transparent plate, a photo sensor for receiving light from the face of the transparent plate, and a blocking element for blocking the secondary reflected light while allowing the primary reflected light to reach the photo sensor.
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