公开(公告)号：US20160161731A1

公开(公告)日：2016-06-09

申请号：US14230582

申请日：2014-03-31

Applicant: STEVEN R.J. BRUECK ,  YULIYA KUZNETSOVA ,  ALEXANDER NEUMANN

Inventor： STEVEN R.J. BRUECK ,  YULIYA KUZNETSOVA ,  ALEXANDER NEUMANN

IPC: G02B21/36 ,  G01B9/02

CPC classification number: G01B9/02015 ,  G01B9/04 ,  G01N21/65 ,  G01N2021/653 ,  G02B21/0056 ,  G02B21/06 ,  G02B21/18 ,  G02B21/365 ,  G06T3/4061

Abstract: In accordance with the aspects of the present disclosure, a method and apparatus is disclosed for three-dimensional imaging interferometric microscopy (IIM), which can use at least two wavelengths to image a three-dimensional object. The apparatus can include a first, a second, and a third optical system. The first optical system is disposed to provide a substantially coherent illumination to the 3D object, wherein the illumination is characterized by a plurality of wavelengths. The second optical system includes an optical image recording device and one or more additional optical components characterized by a numerical aperture NA. The third optical system provides interferometric reintroduction of a portion of the coherent illumination as a reference beam into the second optical system. An image recording device records each sub-image formed as a result of interference between the illumination that is scattered by the 3D object and the reference beam.

Abstract translation: 根据本公开的方面，公开了用于三维成像干涉显微镜（IIM）的方法和装置，其可以使用至少两个波长来成像三维物体。 该装置可以包括第一，第二和第三光学系统。 第一光学系统设置成向3D对象提供基本相干的照明，其中照明由多个波长表征。 第二光学系统包括光学图像记录装置和由数值孔径NA表征的一个或多个附加光学部件。 第三光学系统将相干照明的一部分的干涉重新引入作为参考光束进入第二光学系统。 图像记录装置记录由作为3D对象散射的照明与参照光束之间的干涉而形成的各子图像。