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1.发明申请公开(公告)号：US20190121124A1
公开(公告)日：2019-04-25
申请号：US16226005
申请日：2018-12-19
Applicant: STMicroelectronics S.r.l.
Inventor： Francesco PROCOPIO , Giulio RICOTTI
CPC classification number: G02B26/0858 , G03B21/008 , H01L41/042 , H01L41/09 , H01L41/0933 , H04N9/3129
Abstract: A MEMS device includes a fixed supporting body forming a cavity, a mobile element suspended over the cavity, and an elastic element arranged between the fixed supporting body and the mobile element. First, second, third, and fourth piezoelectric elements are mechanically coupled to the elastic element, which has a shape symmetrical with respect to a direction. The first and second piezoelectric elements are arranged symmetrically with respect to the third and fourth piezoelectric elements, respectively. The first and fourth piezoelectric elements are configured to receive a first control signal, whereas the second and third piezoelectric elements are configured to receive a second control signal, which is in phase opposition with respect to the first control signal so that the first, second, third, and fourth piezoelectric elements deform the elastic element, with consequent rotation of the mobile element about the direction.
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2.发明申请公开(公告)号：US20150082856A1
公开(公告)日：2015-03-26
申请号：US14498966
申请日：2014-09-26
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Dario PACI , Francesco PROCOPIO , Carlo VALZASINA , Paolo ANGELINI , Francesco DIAZZI , Roberto Pio BAORDA , Danilo Karim KADDOURI
CPC classification number: G01D18/00 , B81B2207/012 , B81B2207/03 , B81C99/003 , G01K13/00 , G01R33/0017 , G01R33/09 , H05B3/16
Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.
Abstract translation: 一种集成传感器装置，包括第一管芯，容纳传感器元件以检测传感器装置外部的量并将外部量转换成电感测信号; 机械地耦合到第一模具的第二模具，使得第一和第二模具沿着同一轴线彼此堆叠; 以及集成在第一管芯和/或第二管芯中的至少一个电阻型加热器，具有第一导电端子和第二导电端子，该第二导电端子被配置为耦合信号发生器的相应的第一和第二导电端子，用于引起电流 在使用中在加热器的第一和第二导电端子之间流动，并通过焦耳效应产生热量。 可以在传感器元件的温度下进行校准。
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3.发明申请公开(公告)号：US20190259932A1
公开(公告)日：2019-08-22
申请号：US16277952
申请日：2019-02-15
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Francesco PROCOPIO , Fabio QUAGLIA
IPC: H01L41/047 , G10K11/02 , B06B1/06
Abstract: A device for emitting an ultrasound acoustic wave in a propagation medium, comprising: a package including a base substrate and a cap coupled to the base substrate and defining therewith a chamber in the package; a semiconductor die, coupled to the base substrate in the chamber, comprising a semiconductor body; a micromachined ultrasonic transducer (MUT) integrated at least in part in the semiconductor body and including a cavity in the semiconductor body and a membrane suspended over the cavity; and an actuator, operatively coupled to the membrane, which can be operated for generating a deflection of the membrane. The membrane is designed in such a way that a resonance frequency thereof matches an acoustic resonance frequency that, during operation of the MUT, develops in said chamber of the package.
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公开(公告)号：US20180335326A1
公开(公告)日：2018-11-22
申请号：US16049262
申请日：2018-07-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Dario PACI , Francesco PROCOPIO , Carlo VALZASINA , Paolo ANGELINI , Francesco DIAZZI , Roberto Pio BAORDA , Danilo Karim KADDOURI
CPC classification number: G01D18/00 , B81B2207/012 , B81B2207/03 , B81C99/003 , G01K13/00 , G01R33/0017 , G01R33/09 , H05B3/16
Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.
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