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公开(公告)号:US20180301625A1
公开(公告)日:2018-10-18
申请号:US15953921
申请日:2018-04-16
Inventor: Pierre MORIN , Michel HAOND , Paola ZULIANI
CPC classification number: H01L45/126 , H01L27/2436 , H01L27/2463 , H01L27/2472 , H01L45/06 , H01L45/065 , H01L45/1233 , H01L45/124 , H01L45/1293 , H01L45/144 , H01L45/16 , H01L45/1608
Abstract: A phase change memory includes an L-shaped resistive element having a first part that extends between a layer of phase change material and an upper end of a conductive via and a second part that rests at least partially on the upper end of the conductive via and may further extend beyond a peripheral edge of the conductive via. The upper part of the conductive via is surrounded by an insulating material that is not likely to adversely react with the metal material of the resistive element.
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公开(公告)号:US20170373120A1
公开(公告)日:2017-12-28
申请号:US15374304
申请日:2016-12-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Paola ZULIANI , Gianluigi CONFALONIERI , Annalisa GILARDINI , Carlo Luigi PRELINI
CPC classification number: H01L27/2463 , H01L27/2436 , H01L45/06 , H01L45/1233 , H01L45/126 , H01L45/1293 , H01L45/144 , H01L45/16 , H01L45/1683
Abstract: A phase-change memory cell, comprising: a substrate housing a transistor, for selection of the memory cell, that includes a first conduction electrode; a first electrical-insulation layer on the selection transistor; a first conductive through via through the electrical-insulation layer electrically coupled to the first conduction electrode; a heater element including a first portion in electrical contact with the first conductive through via and a second portion that extends in electrical continuity with, and orthogonal to, the first portion; a first protection element extending on the first and second portions of the heater element; a second protection element extending in direct lateral contact with the first portion of the heater element and with the first protection element; and a phase-change region extending over the heater element in electrical and thermal contact therewith.
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