公开(公告)号：US20210225853A1

公开(公告)日：2021-07-22

申请号：US17220286

申请日：2021-04-01

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Quentin Hubert ,  Abderrezak Marzaki ,  Julien Delalleau

IPC: H01L27/1157 ,  G11C5/06 ,  H01L27/11565

Abstract: In one embodiment, a non-volatile memory device includes a vertical state transistor disposed in a semiconductor substrate, where the vertical state transistor is configured to trap charges in a dielectric interface between a semiconductor well and a control gate. A vertical selection transistor is disposed in the semiconductor substrate. The vertical selection transistor is disposed under the state transistor, and configured to select the state transistor.

公开(公告)号：US10770409B2

公开(公告)日：2020-09-08

申请号：US16051680

申请日：2018-08-01

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Abderrezak Marzaki ,  Christian Rivero ,  Quentin Hubert

IPC: G06K19/073 ,  G06F21/75 ,  H01L23/00 ,  H01L27/02

Abstract: An integrated electronic circuit includes a semiconductor substrate with a semiconductor well that is isolated by a buried semiconductor region located under the semiconductor well. A vertical MOS transistor formed in the semiconductor well includes a source-drain region provided by the buried semiconductor region. Backside thinning of the semiconductor substrate is detected by biasing the vertical MOS transistor into an on condition to supply a current and then comparing that current to a threshold. Current less than a threshold is indicative that the semiconductor substrate has been thinned from the backside.

公开(公告)号：US11081488B2

公开(公告)日：2021-08-03

申请号：US17026874

申请日：2020-09-21

Applicant: STMicroelectronics (Rousset) SAS ,  STMicroelectronics (Crolles 2) SAS

Inventor： Abderrezak Marzaki ,  Arnaud Regnier ,  Stephan Niel ,  Quentin Hubert ,  Thomas Cabout

IPC: H01L27/108 ,  H01L29/66 ,  H01L29/94 ,  H01L49/02

Abstract: A capacitive element includes a trench extending vertically into a well from a first side. The trench is filled with a conductive central section clad with an insulating cladding. The capacitive element further includes a first conductive layer covering a first insulating layer that is located on the first side and a second conductive layer covering a second insulating layer that is located on the first conductive layer. The conductive central section and the first conductive layer are electrically connected to form a first electrode of the capacitive element. The second conductive layer and the well are electrically connected to form a second electrode of the capacitive element. The insulating cladding, the first insulating layer and the second insulating layer form a dielectric region of the capacitive element.

公开(公告)号：US10818669B2

公开(公告)日：2020-10-27

申请号：US16111480

申请日：2018-08-24

Applicant: STMicroelectronics (Rousset) SAS ,  STMicroelectronics (Crolles 2) SAS

Inventor： Abderrezak Marzaki ,  Arnaud Regnier ,  Stephan Niel ,  Quentin Hubert ,  Thomas Cabout

IPC: H01L27/108 ,  H01L29/66 ,  H01L49/02 ,  H01L29/94

Abstract: A capacitive element includes a trench extending vertically into a well from a first side. The trench is filled with a conductive central section clad with an insulating cladding. The capacitive element further includes a first conductive layer covering a first insulating layer that is located on the first side and a second conductive layer covering a second insulating layer that is located on the first conductive layer. The conductive central section and the first conductive layer are electrically connected to form a first electrode of the capacitive element. The second conductive layer and the well are electrically connected to form a second electrode of the capacitive element. The insulating cladding, the first insulating layer and the second insulating layer form a dielectric region of the capacitive element.

公开(公告)号：US11943931B2

公开(公告)日：2024-03-26

申请号：US17220286

申请日：2021-04-01

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Quentin Hubert ,  Abderrezak Marzaki ,  Julien Delalleau

IPC: H10B43/35 ,  G11C5/06 ,  H10B43/10

CPC classification number: H10B43/35 ,  G11C5/063 ,  H10B43/10

Abstract: In one embodiment, a non-volatile memory device includes a vertical state transistor disposed in a semiconductor substrate, where the vertical state transistor is configured to trap charges in a dielectric interface between a semiconductor well and a control gate. A vertical selection transistor is disposed in the semiconductor substrate. The vertical selection transistor is disposed under the state transistor, and configured to select the state transistor.

公开(公告)号：US11493470B2

公开(公告)日：2022-11-08

申请号：US16928551

申请日：2020-07-14

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Matthias Vidal-Dho ,  Quentin Hubert ,  Pascal Fornara

IPC: G01N27/22 ,  G01N27/12 ,  H01L23/00

Abstract: Moisture that is possibly present in an integrated circuit is detected autonomously by the integrated circuit itself. An interconnect region of the integrated circuit includes a metal level with a first track and a second track which are separated by a dielectric material. A detection circuit applies a potential difference between the first and second tracks. A current circulating in one of the first and second tracks in response to the potential difference is measured and compared to a threshold. If the current exceeds the threshold, this is indicative of the presence of moisture which renders said dielectric material less insulating.

公开(公告)号：US10991710B2

公开(公告)日：2021-04-27

申请号：US16391768

申请日：2019-04-23

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Quentin Hubert ,  Abderrezak Marzaki ,  Julien Delalleau

IPC: H01L27/1157 ,  G11C5/06 ,  H01L27/11565

Abstract: A non-volatile memory device includes a vertical state transistor disposed in a semiconductor substrate, where the vertical state transistor is configured to trap charges in a dielectric interface between a semiconductor well and a control gate. A vertical selection transistor is disposed in the semiconductor substrate. The vertical selection transistor is disposed under the state transistor, and configured to select the state transistor.

公开(公告)号：US11139303B2

公开(公告)日：2021-10-05

申请号：US17026869

申请日：2020-09-21

Applicant: STMicroelectronics (Rousset) SAS ,  STMicroelectronics (Crolles 2) SAS

Inventor： Abderrezak Marzaki ,  Arnaud Regnier ,  Stephan Niel ,  Quentin Hubert ,  Thomas Cabout

IPC: H01L27/108 ,  H01L29/66 ,  H01L49/02 ,  H01L29/94

Abstract: A capacitive element includes a trench extending vertically into a well from a first side. The trench is filled with a conductive central section clad with an insulating cladding. The capacitive element further includes a first conductive layer covering a first insulating layer that is located on the first side and a second conductive layer covering a second insulating layer that is located on the first conductive layer. The conductive central section and the first conductive layer are electrically connected to form a first electrode of the capacitive element. The second conductive layer and the well are electrically connected to form a second electrode of the capacitive element. The insulating cladding, the first insulating layer and the second insulating layer form a dielectric region of the capacitive element.

公开(公告)号：US20190341390A1

公开(公告)日：2019-11-07

申请号：US16391768

申请日：2019-04-23

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Quentin Hubert ,  Abderrezak Marzaki ,  Julien Delalleau

IPC: H01L27/1157 ,  H01L27/11565 ,  G11C5/06

Abstract: In one embodiment, a non-volatile memory device includes a vertical state transistor disposed in a semiconductor substrate, where the vertical state transistor is configured to trap charges in a dielectric interface between a semiconductor well and a control gate. A vertical selection transistor is disposed in the semiconductor substrate. The vertical selection transistor is disposed under the state transistor, and configured to select the state transistor.