公开(公告)号：US20190115524A1

公开(公告)日：2019-04-18

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H02N2/18 ,  H01L41/22 ,  H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/25 ,  H01L41/187 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20220332650A1

公开(公告)日：2022-10-20

申请号：US17710393

申请日：2022-03-31

Applicant: STMicroelectronics S.R.L.

Inventor： Valeria CASUSCELLI ,  Rossana SCALDAFERRI ,  Paola Sabrina BARBATO

IPC: C04B35/49 ,  C04B35/468 ,  C04B35/626 ,  C04B35/622 ,  C04B35/64 ,  H01L41/187

Abstract: The present disclosure relates to a method for the preparation of a precursor solution for a ceramic of the BZT-aBXT type wherein X is selected from Ca, Sn, Mn and Nb and a is a molar fraction selected in the range between 0.10 and 0.90 comprising the steps of: a) dissolving at least one barium precursor compound and at least one precursor compound selected from the group consisting of a calcium precursor compound, a tin precursor compound, a manganese precursor compound and a niobium precursor compound in a linear or branched anhydrous alkyl alcohol containing from 2 to 6 carbon atoms and, after dissolution, dehydrating by stripping, to obtain a first solution; b) dissolving at least one zirconium precursor compound and at least one titanium precursor compound in a linear or branched anhydrous alkyl alcohol containing from 2 to 6 carbon atoms in the presence of an anhydrous chelating agent to obtain a second solution; c) joining said first and second solutions in an anhydrous environment and dehydrating by stripping to obtain said precursor solution. It also relates to a precursor solution, to a method for the preparation of a film of a piezoelectric material, to a piezoelectric material and to an electronic device comprising this piezoelectric material.

公开(公告)号：US20220246832A1

公开(公告)日：2022-08-04

申请号：US17722713

申请日：2022-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.