公开(公告)号：US20170033272A1

公开(公告)日：2017-02-02

申请号：US14814660

申请日：2015-07-31

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Immacolata PEDACI ,  Angela CIMMINO ,  Valeria CASUSCELLI ,  Giampiero PEPE

IPC: H01L35/34 ,  H01L35/32

CPC classification number: H01L35/34 ,  H01L35/32

Abstract: A method is for making a thermoelectric generator device. The method may include forming bottom contacts on a first substrate, and forming a polymer layer over the first substrate with recesses therein, the recesses being over the bottom contacts. The method may include forming a semiconductor material fluid in the recesses of the polymer layer to define thermoelectric couples coupled to the bottom contacts, forming top contacts adjacent a second substrate, and positioning the second substrate so that the top contacts are coupled to the thermoelectric couples.

Abstract translation: 一种制造热电发生器装置的方法。 该方法可以包括在第一基底上形成底部接触，以及在其上具有凹槽的第一基底上形成聚合物层，凹陷在底部触点之上。 该方法可以包括在聚合物层的凹部中形成半导体材料流体以限定耦合到底部触点的热电耦合，形成邻近第二基板的顶部触点，并且定位第二基板，使得顶部触点耦合到热电偶 。

公开(公告)号：US20190115524A1

公开(公告)日：2019-04-18

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H02N2/18 ,  H01L41/22 ,  H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/25 ,  H01L41/187 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20220332650A1

公开(公告)日：2022-10-20

申请号：US17710393

申请日：2022-03-31

Applicant: STMicroelectronics S.R.L.

Inventor： Valeria CASUSCELLI ,  Rossana SCALDAFERRI ,  Paola Sabrina BARBATO

IPC: C04B35/49 ,  C04B35/468 ,  C04B35/626 ,  C04B35/622 ,  C04B35/64 ,  H01L41/187

Abstract: The present disclosure relates to a method for the preparation of a precursor solution for a ceramic of the BZT-aBXT type wherein X is selected from Ca, Sn, Mn and Nb and a is a molar fraction selected in the range between 0.10 and 0.90 comprising the steps of: a) dissolving at least one barium precursor compound and at least one precursor compound selected from the group consisting of a calcium precursor compound, a tin precursor compound, a manganese precursor compound and a niobium precursor compound in a linear or branched anhydrous alkyl alcohol containing from 2 to 6 carbon atoms and, after dissolution, dehydrating by stripping, to obtain a first solution; b) dissolving at least one zirconium precursor compound and at least one titanium precursor compound in a linear or branched anhydrous alkyl alcohol containing from 2 to 6 carbon atoms in the presence of an anhydrous chelating agent to obtain a second solution; c) joining said first and second solutions in an anhydrous environment and dehydrating by stripping to obtain said precursor solution. It also relates to a precursor solution, to a method for the preparation of a film of a piezoelectric material, to a piezoelectric material and to an electronic device comprising this piezoelectric material.

公开(公告)号：US20220246832A1

公开(公告)日：2022-08-04

申请号：US17722713

申请日：2022-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.