公开(公告)号：US12209008B2

公开(公告)日：2025-01-28

申请号：US17752016

申请日：2022-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Gabriele Gattere ,  Manuel Riani ,  Roberto Carminati

IPC: B81B3/00

Abstract: A MEMS actuator includes a mobile mass suspended over a substrate in a first direction and extending in a plane that defines a second direction and a third direction perpendicular thereto. Elastic elements arranged between the substrate and the mobile mass have a first compliance in a direction parallel to the first direction that is lower than a second compliance in a direction parallel to the second direction. Piezoelectric actuation structures have a portion fixed with respect to the substrate and a portion that deforms in the first direction in response to an actuation voltage. Movement-transformation structures coupled to the piezoelectric actuation structures include an elastic movement-conversion structure arranged between the piezoelectric actuation structures and the mobile mass. The elastic movement-conversion structure is compliant in a plane formed by the first and second directions and has first and second principal axes of inertia transverse to the first and second directions.

公开(公告)号：US11933810B2

公开(公告)日：2024-03-19

申请号：US17930689

申请日：2022-09-08

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Valentina Zega ,  Gabriele Gattere ,  Attilio Alberto Frangi ,  Andrea Opreni ,  Manuel Riani

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: The present disclosure is directed to a detection structure for a vertical-axis resonant accelerometer. The detection structure includes an inertial mass suspended above a substrate and having a window provided therewithin and traversing it throughout a thickness thereof. The inertial mass is coupled to a main anchorage, arranged in the window and integral with the substrate, through a first and a second anchoring elastic element of a torsional type. The detection structure also includes at least a first resonant element having longitudinal extension, coupled between the first elastic element and a first constraint element arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element which extends below the first resonant element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage.