Micropump for integrated device for biological analyses
    1.
    发明申请
    Micropump for integrated device for biological analyses 有权
    用于生物分析的集成器件的微型泵

    公开(公告)号:US20040141856A1

    公开(公告)日:2004-07-22

    申请号:US10663239

    申请日:2003-09-16

    Inventor: Mario Scurati

    Abstract: A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).

    Abstract translation: 微型泵包括半导体材料的本体(10),其容纳具有低于大气压的内部预设压力的流体密封室(32)。 由能够电打开的隔膜(35)密封的流体密封室(32)可以使用容纳在隔膜(35)的部分之间的第一电极(37)和第二电极(38)选择性地打开。

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