公开(公告)号：US20140238852A1

公开(公告)日：2014-08-28

申请号：US14188134

申请日：2014-02-24

Applicant: SULZER METAPLAS GMBH

Inventor： Joerg VETTER ,  Stefan ESSER ,  Jurgen MUELLER ,  Georg ERKENS

IPC: H01J37/32

CPC classification number: H01J37/32669 ,  C23C14/325 ,  C23C14/3407 ,  C23C14/35 ,  H01J37/32055 ,  H01J37/32614 ,  H01J37/3402 ,  H01J37/3432 ,  H01J37/345

Abstract: Cylindrical evaporation source which includes, at an outer cylinder wall, target material to be evaporated as well as a first magnetic field source and a second magnetic field source which form at least a part of a magnet system and are arranged in an interior of the cylindrical evaporation source for generating a magnetic field. In this respect, first magnetic field source and second magnetic field source are provided at a carrier system such that a shape and/or a strength of the magnetic field can be set in a predefinable spatial region in accordance with a predefinable scheme. In embodiments, the carrier system is configured for setting the shape and/or strength of the magnetic field of the carrier system such that the first magnetic field source is arranged at a first carrier arm and is pivotable by a predefinable pivot angle (α1) with respect to a first pivot axis.

Abstract translation: 圆柱形蒸发源，其在外筒壁处包括待蒸发的靶材料以及形成至少一部分磁体系统的第一磁场源和第二磁场源，并且布置在圆筒形的内部 用于产生磁场的蒸发源。 在这方面，第一磁场源和第二磁场源设置在载体系统处，使得磁场的形状和/或强度可以根据预定义方案设置在可预定的空间区域中。 在实施例中，载体系统被配置用于设置载体系统的磁场的形状和/或强度，使得第一磁场源布置在第一载体臂处，并且可由可预定的枢转角度（α1）与 相对于第一枢轴。